Surrey Ion Beam Centre An EPSRC sponsored centre for 25 years

1
Surrey Ion Beam CentreAn EPSRC sponsored centre
for 25 years

• Investment
• Support
• 4M investment in machines and beam lines
• Approx 1M per annum support
• 4 academics
• 7 RAs (2 senior RAs)
• 3 technicians 0.5 secretary
• Technology Transfer
• 32 University departments around the UK
• 22 local and international companies
• 17 PhD projects
• Supporting gt50 EPSRC grants worth gt25M

2
Surrey Ion Beam CentreAn EPSRC sponsored centre
for 25 years

• Controllable Materials Modification
• Facilities
• 0.4-2MV High Energy Implanter
• 2-200kV High Current Implanter
• Implantation 2keV?4MeV (up to 10mA)
• Sample size mm2 to 40cmx40cm
• Hot (1000oC) or cold (LN)
• Sample Chambers in class 100 clean room
• Applications
• Ion Beam Synthesis
• Buried and surface oxides and silicides
• Ion Implantation
• Defect Engineering
• Proton beam lithography
• potentially nm resolution to 10?m depths

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Surrey Ion Beam CentreAn EPSRC sponsored centre
for 25 years
MgB2 precipitates

• Nano Applications of IBMM
• Ion Beam Synthesis
• Oxides and silicide surface layers
• Buried layers
• Conducting, insulating,
  superconducting, optical
• Doping
• Ultra-shallow junctions (10-20nm)
• Defect Engineering
• strain effects from dislocations
• light emission from Si
• control of TED (vacancy engineering)

100nm
20keV Boron
Implant
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Surrey Ion Beam CentreAn EPSRC sponsored centre
for 25 years

• Nano Applications of IBMM
• Lithography
• Proton Beam Lithography
• direct write (30nm x 10?m)
• fast as e-beam lithography
• Photo-resists PMMA, SU8
• make structures or
• use as templates
• Photo-glasses
• Si, GaAs
• Slows electrochemical etching
• direct write MEMs Structures

Courtesy of Centre for Ion Beam Applications
Singapore
10um
5
Surrey Ion Beam CentreAn EPSRC sponsored centre
for 25 years

• Advanced Materials Analysis
• Facililties
• 2MV Tandem
• Techniques include RBS, EBS, ERD, PIXE, NRA
• Sub micron size microbeam with full scanning
• Channelling Spectroscopy for damage analysis
• Fully automated collection and analysis
• External Beam under development
• Applications
• Thin Film Depth Profiling
• Compositional Analysis
• Disorder Profiling of Crystals
• 3-D elemental composition and mapping