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Etching - PowerPoint PPT Presentation

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Title:

Etching

Description:

dy/dt:dx/dt:6. Gas Phase Reaction with volatile products ... Ar 15.759 eV. Plasma Etch Mechanism. PreClean. O2 e O2 2e. O2 e 2O e. O e O- O2 e 2O ... – PowerPoint PPT presentation

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Slides: 31
Provided by: terry5
Learn more at: http://www.che.utah.edu
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