MPW Design Introduction Course Part3'

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MPW Design Introduction Course - Part3.
Design - Part I
Resonating Structures, CMM
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Contents Design Part I

• Processes at SensoNor
• Mask-related conventions
• Layout rules Design limitations
• Specific

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Design limitations

• Defined bond pad area
• Minimum width of the anodic bonding area
• Minimum width ofthe glass cavities
• Width of the dicingstreet

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The bulk silicon etching
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The bulk silicon etching (2)
Isolated p-substrate
n-epi


n-well
Bias
p-substrate
Etch mask
Etching solution
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The bulk silicon etching (3)
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The bulk silicon etching (4)

• Lateral Displacement (LD) tolerances depends on
  tolerances of
• Underetch
• Backside mask
• Alignment
• Oxide mask definition
• Angle mask alignment
• Wafer orientation
• Wafer flat orientation
• Wafer thickness uniformityed Etch Depth

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The Anodic Bonding
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The release etch (1)

• Etched area lt 30 die area

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The release etch (2)
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Micromachining of glass
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Conventions (1)

• Mask naming conventions
• Functionality of the layer
• BUCON
• NOWEL, NOSUR
• Projection masks
• BETCH
• Mask polarities
• Straight
• Reverse

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Conventions (2)

• Mirrored masks

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Mask level layout rules (1)

• Intra-layer rules
• Space
• Line
• Notch

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Examples
BETCH
NOWEL

• Line, bulk area (a)
• Space, bulk area (b)
• Line, bulk etched area (c)
• Space, bulk etched area (d)

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Mask level layout rules (2)

• Inter-layer rules
• MASKA covers MASKB
• MASKA covers border MASKB

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Mask level layout rules (3)

• Inter-layer rules
• MASKA separated from MASKB
• coincidence is allowed
• No coincidenceMASKA and MASKB

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Mask level layout rules (4)

• Inter-layer rules
• MASKA separatedfrom border MASKB
• MASKA overlapsMASKB

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Mask level layout rules (5)

• Multi-layer rules
• Examples
• MASKA covers MASKB in MASKC
• MASKA covers MASKB in
• MASKC-MASKD stacked feature

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Examples (1)

• Space BURES (a)
• BURES separated fromNOWEL (b)
• No coincidence BURESand NOWEL
• BURES overlaps BUCONcoincidence (c)
• for electrical connection

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Examples (2)

• NOWEL covers BUCON in NOWEL (a)
• BUCON separated from NOWEL outside NOWEL (b)

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Examples (3)

• SUCON overlaps BUCONcoincidence (a) for
  electrical connection
• SUCON separated fromBUCON (b) for electrical
  insulation

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Design Part 1

• End of this chapter
• Questions or comments?