Title: CSPIN is a NSF Materials Research Science and Engineering Center MRSEC Oklahoma NanoNet an NSF EPSCo
1C-SPIN is a NSF Materials Research Science and
Engineering Center (MRSEC)Oklahoma NanoNet an
NSF EPSCoR Center
Nanoscience Evolution and Revolution (a Physics
Perspective) And Whats new at the Center for
Semiconductor Physics in Nanostructures
Oklahoma
Arkansas
Physics and Astronomy Electrical and Computing
Engineering Chemistry and Biochemistry
Physics Chemistry Electrical Engineering
Matthew Johnson
2Outline
- Whats a Nanometer natural and man made length
scales - Definition on Nanoscience Partly in the eye of
beholder - like beauty - Physical Attributes and Processes
- History (Electronics/Solid Materials
BioMedical Science Fiction) - Pre history (lt1900) b) History (gt1900)
- Moores Law computers are getting faster and
smaller - Tools
- Characterization eyes etc.
- Fabrication - lithography and related tools
- Top down and bottom up / Serial versus parallel
- Nanotechnology Demos
- Aerogel/ Zeolites
- Lasers/LEDs (Light Emitting Diodes)
- Quantum Dots
- Memory metal
- Ordered arrays of NanoStructures
- Future
3The Scale of Things -- Nanometers and More
Things Natural
Things Manmade
MicroElectroMechanical devices 10 -100 mm wide
Red blood cells
Pollen grain
Zone plate x-ray lensOutermost ring spacing
35 nm
Atoms of silicon spacing tenths of nm
Office of Basic Energy Sciences Office of
Science, U.S. DOE Version 03-05-02
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5What is Nanoscience??
http//www.nhn.ou.edu/bumm/NanoLab/links.html
Nanoscience/Nanotechnology Partly in the eye of
beholder - like beauty.
From the Greek nanos - meaning "dwarf" this
prefix is used in the metric system to mean 10-9
or one billionth
NanoSized 1D lt 100 nm (in 70s initially 10
nm) 2D lt 100 nm in at least 2D
NanoStructured Has structure on the nanoscale.
But everything does, e.g. metallurgy and
steel. And it is important!
- Definition from the National Nanotechnology
Initiative - Nanotechnology involves research and technology
development at the 1nm-to-100nm range. - Nanotechnology creates and uses structures that
have novel properties because of their small
size. - Nanotechnology builds on the ability to control
or manipulate at the atomic scale.
My definition for Physicists involves
Deterministic control, not just size. i.e. some
determinism even addressability (nanometer
control) in fabrication/synthesis and/or imaging.
6Nanotechnology Pre-History before about 1900
Colloidal Glass Nanosize metal particle
(precipitates) in glass
- 400 Lycurgus Cup
- 1600s Medieval Stained Class
- Franklin spreads monolayer of oil on pond in
England - 1858 Faraday discovers colloid gold
- 1890s Rayleigh- dipole scattering
- 1908 Mie develops Mie theory light scattering
(dipole and higher terms)
Technology rediscovered in the 1600s and used for
colored stained glass windows.
Lycurgus Cup is made of glass. Roman 400
AD, Myth of King Lycurgus
Monolayers of oil on water
7Nanotechnology Pre-History before about 1900
Colloidal Glass Nanosize metal particle
(precipitates) in glass
1858 Faraday discovers colloid gold 1890s Rayleigh
- dipole scattering 1908 Mie develops Mie
theory light scattering (dipole and higher terms)
Technology rediscovered in the 1600s and used for
colored stained glass windows.
Lycurgus Cup is made of glass. Roman 400
AD, Myth of King Lycurgus
8Physics in the Nano-Regime
9Moores Law IIntegrated Circuit Complexity
Moores Law An emperical trend in the
microelectronics industry for the number of
circuits per chip to double roughly every 18
months.
Top-Down Fabrication
Source Intel
10Transistor to IC to Nanotechnology
300 mm Wafer
Pentium chip with 3.3 Million transistors
11Gate Oxide/ Inversion layer
Gate Length
Three Si atoms in a line are 1 nm. This is about
the thickness of the gate oxide in current
devices and the thickness of the inversion layer
the conducting electron region of a transistor
12Moores Law Digital Magnetic Storage Systems
100 nm All Dimensions
EMR Technology ?
- C-SPIN has efforts in
- Read-head technology
- Patterned perpendicular recording media
13Magnetic Storage Media
Cross Section of Disk
Toshibas 1.8 disk drive 40 Gbyte platter, 133
Gbyte/in2 Perpendicular media
Pixie Dust Anti-Ferro Magnetic Coupling
New bit size 20 nm x 100 nmGrain size 8
nmRuthenium layer 0.6 nm
14Transmission Electron Microscope (TEM)
Electron Holography
Atomic Lattice Imaging
ADVANTAGES Atomic, chemical, magnetic and
crystalline mapping/ imaging on the nanometer
scale Lattice Imaging DISADVANTAGE Sample
preparation, sample must be 10 nm thick, but
that just takes care and patience.
Electron Diffraction Gold Particles
X-ray Chemical Mapping
Electron Energy Loss Mapping
15Scanning Electron Microscope
ADVANTAGES Easy sample preparation, atomic
analysis/mapping high-resolution e-beam
lithography DISADVANTAGE Mostly looks at
surface and resolution not as good as TEM
16Scanning Tunneling Microscopy Imaging
Requires atomic precise tip positioning no
mechanical vibration between tip sample
atomically sharp tips
Lloyd J. Whitman, NRL
17Scanning Probe Microscopy Pick and Put
Atomic force microscopy
Advantage ultimate atomic resolution Disadvantag
e Serial VERY SLOW
Xe atoms on Ni at 4.2 K
18Photolithography Top-Down, BUT very Parallel
- Photolithography is probably the most important
process for keeping up with Moores Law - Improvements include
- Continual reduction in l, now deep UV (248 to
157 nm), soon extreme UV (13.5 nm). - phase-shift masks (PSM), optical proximity
correction (OPC). - Typical ICs involve about 40 masks, or 40 mask
aligning steps. -
19Dry Etching Tools
ICP-RIE Inductively-Coupled Plasma Reactive Ion
Etcher
Physical Sputtering 500 eV Ar ion beam
- Anisotropic, good selectivity
- With passivation chemistry, can get high- aspect
ratio trenches - High etch rates
- Lower energies resulting in less charge damage
- Poor anisotropy (21), poor selectivity.
- Results in sputter damage.
- Used in conjunction with electron beam analysis
20Molecular Beam Epitaxy Layer by Layer Growth
Elemental deposition from each effusion cell is
controlled to sub-monolayer (ML) thickness, a
requirement for high performance devices.
Cell-phones and ultra-efficient lasers require
this sort of atomic layer precision.
Large area scan showing atomic layers of GaAs
formed during growth. Magnified image showing
ordering of individual atoms. Further magnified
image showing misfit dislocation. (UA)
21Top down vs. Bottom up
- Top Down surgery, all lithography,
conventional IC fabrication - Gets more difficult as size becomes Nano
- Self assembly Self-Assembled Monolayers (SAMs),
DNA replication - Happens spontaneously
- Combine Top Down and Self Assembly?
Serial vs. Parallel
- Parallel Photography, Photo Lithography, Self
assembly - VERY FAST
- Serial Writing, E-beam or Ion-beam Lithography
- VERY SLOW
- Parallel makes it very manufacturable!
22Fantastic Voyage
In round numbers human is about 1.5 m tall, but
blood vessel is about 1 mm. Thus Fantastic
Voyage requires a 0.51,500 or 13000 size
reduction. Clearly Science Fiction.
Clearly Flawed
23NanoBots, NanoCompilers etc.
Nanobots! we cant even make big things
replicate. Best worry about genetic engineering
first.
Pick and Put assembly is very SLOW and will be
very difficult in real 3D. Better to follow
natures lead use self assembly ideas.
24Colloidal NanoParticles
V. Klimov, Los Alamos
25Magnetic NanoParticles
Biomedical Applications
TEM image of uncoated magnetite Fe3O4 MNPs
Superparamagnetic nanoparticles in the middle ear
epithelium and tympanic membrane can be driven by
an external magnetic field.
- Other applications
- Targeted drug delivery
- Biosensors.
26What Are Carbon Nanotubes?
Diamond
Graphite
- Discovered by Sumio Iijima in 1991
- Combination of graphite and C60
- Rolled up sheets of graphene, capped with half a
fullerene molecule - Two types
- Single-Walled
- Multi-Walled nested single-walled tubes
27Motivations and Applications
- Nanotechnology is fast-growing field
- Basis for the new carbon chip which is hundreds
of times smaller than current silicon chips - Quantum wires
- Encapsulation of other materials
- STM, AFM tips
- Strengthen polymer materials
- Bulletproof vests
- Earthquake resistant buildings
- Space elevator?
28MEMS to NEMS
- Micro (Nano) Electro-Mechanical Systems
Wobble Micro-motor fabricated in Silicon
Nano-motor magnet glued to a nanotube
MicroMechanical mirror for optical communications
systems and DLP (Digital Light Processing).
Gears upper left are 50 mm in diameter.
29Nano-Appertures
Ion Sculpting and manipulating DNA artists
rendition.
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32Informal History of Nanoscience
Evolution versus revolution and disruptive
1900 1910 1920 1930 1940 1950 1960 1970 19
80 1990 2000 2005
00 10 20 30 40 50 60 70 80 90
00 05
- X-RAYS
- 1912 von Laue
- 1913 Bragg NaCl
- 1928 Lonsdale benzene
- 1935 Robertson pthalocyanins
-
- 1949 Hodgkin penicillin
Microscopy 1928 e-diffraction 1931 Ruska
TEM 1942 SEM 1950 Field Ion
Microscope 1960s Auger/X-ray 1960s e-beam
lithography 1981 STM 1986 AFM 1989 IBM
Xe on Ni 1995 Quantum Corrals
Opto/Electronics 1947 Transistor 1957
Magnetic Disk IBM RAMAC 1960 Integrated
Circuit 1961 Laser 1965 Moores Law 1970 Fiber
Optics lt20 dB/km 1970s PC 1970s MBE
1980s Quantum Hall Effect, MOD-FET 2000 all
dimensions Nano
Visionary 1959 Feynman There
is room at the bottom 1966 Fantastic Voyage the
Movie 1974 Taniguchi coins term
Nanotechnology engineer materials on nm
level 1987 Eric Drexler Engines of
Creation 1990s Nano is cool 1999 Clinton goes
Nano 2000 NSF Societal Impacts 2002 Prey
Grey Goo
Chemistry 1920s Langmuir-Blodgett film 1930
Polystyrene 1938 Nylon 1938 Teflon 198
3 SAMs 1983 Buckey Ball 1991 Nanotubes 1990s
Colloidal Quantum Dots
33Deposition Tools
Magnetron Sputter Deposition
Thermal Evaporator
Evaporates most non-refractory metalse.g. Au,
In, Cr, Ni
Sputter deposits almost all materialse.g. C
diamond-like or graphite, Niobium, SiO2, Si3N4
34MBE Self-Assembly Quantum dots
STM images of InAs/GaAs quantum dots and there
associated schematic diagrams. (UA)
Ultra-efficient emitters and detectors. Quantum
Computers
35Two Motors Natural Assembly vs. Mechanical
Engineering
36Colloidal Synthesis
Cd(CH3)2 Se-TBP CdSe
QDots
Ar
Stock
Fluorophores for Medical Applications
Stir Plate
TOPO
Heating Mantle
TOPO tri-n-octylphosphine oxide
TBP tributylphosphine