Advanced MOCVD Reactor for Producing New Material Systems

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Advanced MOCVD Reactor for Producing New
Material Systems
Small Business Innovation Research
Spire Corporation
Bedford, MA
INNOVATION In situ monitoring system for Metal
Organic Chemical Vapo Deposition ( MOCVD)
reactor
ACCOMPLISHMENTS ?Constructed all-stainless
steel-high rotation-speed reaction chamber having
4-inch wafer capacity ?? Demonstrated in situ
monitoring system for MOCVD
reactors ??Reaction chamber provides superior
uniformity and control of deposited
films ??Opened door to producing complex material
systems and structures COMMERCIALIZATION
??Sales of vertical-cavity surface-emitting
laser (VCSEL) wafers and other complex epitaxial
wafers reached 250,000 before sale of
optoelectronic division to Method Electronics for
13.5 million
MOCVD Reaction Chamber
GOVERNMENT/ SCIENCE APPLICATIONS ?Production of
new material systems and structures for improved
sensor technology ?Capability of growing
epitaxial wafers having hundreds of precision
layers for complex devices
1992 Phase II NAS7-1305 Success Story 7-001
Jet Propulsion Laboratory