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ART 200

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One tester covers all devices and all functions. 5/26/09. ELES' ART200 at ISELabs. 4 ... ELES Semiconductor Equipment SpA. 22. The first ART 200 production ... – PowerPoint PPT presentation

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Title: ART 200


1
ART 200
2
The challenge
  • New generation devices grow in complexity
  • Identifying all defects through a quick burn-in
    is no longer a choice
  • Devices incorporate multiple functions
  • Test fixtures and software grow more expensive,
    actual test time takes longer
  • Complex testers drive large engineering and
    capital costs

3
The answer Highly Parallel Intelligent Final
Test
  • High Performance Reliability Testers
  • Programmable Testers for fully customized
    solutions
  • On-line monitoring of input and output signals
  • Standardized environment for test flow and data
    output (same in development and production)
  • One tester covers all devices and all functions

4
Test costs are increasing with the reduction in
feature size
5
Reliability Test Challenges
Thermal Run-away
These challenges dramatically increase costs

In some cases test is not feasible by using
traditional approach
6
Design For Test The Way-Out
  • DFT support for straightforward device management
  • Makes feasible reliability testing (IO count
    reduction, PLL ..)
  • Reduces operation cost (equipment, board)
  • DFT support for increased visibility
  • Reduces process cost
  • Test During Burn In
  • Batch Testing
  • Increases yield through on-line defect
    classification
  • Enables straightforward device qualification by
    continuously testing devices during stress

7
ART 200
Very broad Device Coverage
Very broad Application Coverage
Supports all DFT Methodologies
8
ART 200
  • Scan chain
  • JTAG
  • BIST
  • SOFT-BIST

Supports all DFT Methodologies
9
ART 200
  • General digital logic
  • Micro controllers
  • Mixed-signal, analog
  • Non-volatile memories
  • RAM
  • Multimedia
  • Multi-chip
  • Embedded memory
  • 0.8 V Vcc
  • Medium power

Broad Device Coverage
  • System-on-chip

10
ART 200
  • Final Testing
  • Batch Testing
  • Test During Burn In
  • New Product / Process Qualification
  • Endurance Cycling
  • Life Test
  • Reliability Test in Manufacturing
  • Intelligent Burn In

Broad Application Coverage
11
Features
  • One Driver per slot architecture
  • Extremely fast test pattern download
  • Compatible with very low voltage (0.9 V) devices
  • 6 independent power supplies, up to 75 A per slot
  • 288 IO channels
  • Vectorial stimulus/monitoring and algorithmic
    device management
  • 50 nsec vector time, 25 nsec edge placement, all
    common vector formats
  • Complete functional test flow implemented for
    back-end testing of stand-alone and embedded
    memories
  • Analog function generator and monitoring

12
Driver Architecture CPU
  • CPU
  • 220 MIPS MCF 5407
  • Kernel
  • Hardware Supervision
  • Test Program (User)
  • DUT Management (User)

13
Driver Architecture POWER SUPPLIERS
  • PROGRAMMABLE POWER SUPPLIES
  • Independently programmable on each driver
  • 6 channels, any combination of
  • -20 .. 20 V 12.5 A 60 W
  • -100 .. 100 V 6 A 60 W
  • 50 mV precision on the device in the low
    voltage range
  • Alarm monitor on voltage and current
  • 6 reference voltage channels with optional
    current measurement possibility

14
Driver Architecture PROGRAMMABLE LOGIC
  • PROGRAMMABLE LOGIC
  • 600 K Gate
  • 170 MHz
  • Application Specific IP
  • Vector Sequencer
  • Memory
  • Custom

15
Driver Architecture VECTOR SEQUENCER
  • VECTOR SEQUENCER
  • 50 nsec vector time
  • 25 nsec edge placement
  • Formatting on 16 channels
    (NRZ, RTZ, RTO, SBC)
  • 32 Mvectors on 64 channels
  • Configurable (16 M on 128, )
  • Extendable to 64 M
  • Configurable monitoring
  • 32 stimulus 256 monitor 256 / 32
  • Up to 256 devices 256 monitored lines
  • Segmentation
  • Real-time switch between segments
  • Run-time pattern reload

16
Driver Architecture VECTOR DATA AND MEMORY
  • VECTOR / DATA MEMORY
  • 32 M x 64 (64 M x 64
    optional)
  • 50 nsec Access Time

17
Driver Architecture PIN ELECTRONICS
  • PIN ELECTRONICS
  • 288 channels
  • 8 clock
  • Tri-state and i/o programmable in group of 8
  • Vih range 0.8 .. 6.5 V 50 mV precision
  • Vil lt 0.3 V
  • 400 mA output current on 16 channels, 100 mA on
    the remaining ones
  • High voltage on 184 signals

18
Driver Architecture ANALOG MODULE
  • ANALOG MODULE
  • 4-channel Function Generator
  • Standard Waveforms
  • Programmable Offset, Frequency, Amplitude
  • AM and FM Modulator
  • Static Monitor 0..5 V Range

19
Driver Architecture TEST BOARD CONNECTORS
  • TEST BOARD CONNECTORS
  • 540 edge contacts
  • 3 A each
  • 125 V isolation
  • 10 m? contact resistance
  • 6060 kg insertion force
  • 2000 insertions

20
User Benefits (1)
  • Test feasibility
  • DFT support
  • SOC features (memorylogic, memorymixed-signal)
  • Non-deterministic timing or value
  • Cost saving
  • Lower operation cost exploiting DFT features
  • Lower process cost with TDBI and Batch Testing
  • Better time-to-market
  • Unique environment for every reliability and
    functional testing operation

21
User Benefits (2)
  • Increased yield
  • Higher visibility on the devices
  • Detailed reliability data generation
  • Higher outgoing quality
  • Increased stress through DFT
  • Investment optimization
  • Best equipment utilization (wide device family
    coverage)
  • Long-term investment (standardized DFT-based
    device management)

22
  • The first ART 200 production system in the USA

will be installed November 02
at ISE Labs. Fremont CA
You are cordially invited for a personal demo on
September 19, 20, 23 or 24. RSVP to
fdp_at_jcabot.com or doravec_at_iselabs.com
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