Design and Fabrication of Thin Films with Controlled Composition and Texture

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Design and Fabrication of Thin Films with
Controlled Composition and Texture Ellis
Ketterson Labs DMR-0303491

• Concept of Dual-Gun Magnetron Sputtering
• Fine control over composition with independent
  targets
• Is realized in Equipment
• Inexpensive to build, easy to modify
• Which produces the Plasma
• Deposits the film rapidly on a heated substrate
• Resulting in a Textured Hydroxyapatite Film
• Followed by annealing and surface
  functionalization

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We model textured surfaces numerically using the
Kinetic Monte Carlo technique, where atoms are
deposited by a patterned beam, and diffuse to
aggregate into microscopic pillars.
Ions then modify, and small bio-molecules bind
to this surface, providing an interesting enviro
nment for bone-forming cells (osteoblasts) to
attach and function.