Identification, Modeling and Control of MEMS Inertial Sensors Faculty: R.T. M - PowerPoint PPT Presentation

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Identification, Modeling and Control of MEMS Inertial Sensors Faculty: R.T. M

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Jet Propulsion Lab's MEMS Gyro Example: Goal ... UCLA Gyro Control ASIC (Application Specific IC) ADC/DAC, Bias DACs & Analog Circuitry ... – PowerPoint PPT presentation

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Title: Identification, Modeling and Control of MEMS Inertial Sensors Faculty: R.T. M


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Identification, Modeling and Control of MEMS
Inertial SensorsFaculty R.T. MCloskey, J.S.
Gibson Sponsors NSF, ONR, NASA JPL, HRL Labs
Goal Improved Performance of Micro- and Nano-electromechanical Inertial Sensors
Jet Propulsion Labs MEMS Gyro Example
Challenges Maintain low drift over temperature Degenerate modal structure for high sensitivity Significant nonlinearities electrode coupling Low power small footprint necessary for apps
Approach Develop time domain and frequency domain methods for rapid identification of pertinent sensor parameters Robust, nonlinear control strategies for compensation of sensor dynamics Implementation of control and signal processing algorithms with flexible, low-power custom digital circuits
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