Plasmonic Nanolithography

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Plasmonic Nanolithography

• EE235 Nanofabrication
• Jie Yao
• April 16, 2007

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W. Srituravanich, et al, Nano. Lett. 4, 1085
(2004)
2 um
Z. Liu, et al, Nano. Lett. 5, 957, (2005)
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Plasmonic Nanolithography
Surface plasmons (SPs) are collective free
electron oscillations at a metal/dielectric
interface
Main features of SPs

• Shorter wavelength
• (comparing with excitation light)
• Evanescent wave enhancement
• Bond to the surface
• Propagation along the surface

H. Raether, Surface Plasmons, (1988).
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Hole array lithography
W. Srituravanich, et al, Nano. Lett. 4, 1085
(2004)
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Surface Plasmon Interference
Surface Plasmon Interference Nanolithography (SPIN
)
Z. Liu, et al, Nano. Lett. 5, 957, (2005)
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Lithography Results (1D)
(a)
?0365nm
Photoresist
(d)
Al
Quartz
(e)
2 um
Period 115 nm
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Lithography Results
60nm
Low reflectivity from the slit ? slit distance
doesnt affect the pattern quality
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2D SP Interference Lithography

• The interference pattern is determined by the
  arrangement of the SP sources
• The resolution is determined by the SP
  wavelength

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Thank youQuestions?