Obtaining Pure Alphaphased Alumina by Physical Vapor Deposition in an Inverted Cylindrical Magnetron

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Obtaining Pure Alpha-phased Alumina by Physical
Vapor Deposition in an Inverted Cylindrical
Magnetron

• Adam Barito
• Faculty Advisor Dr. Matt Gordon
• 7/21/2008

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Overview

• Background
• CVD vs. PVD
• Deposition process
• Our System
• Design of Experiment
• Characterization

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Background

• Aluminum Oxide
• a-Al2O3 (Alpha-phase alumina)
• Desirable coating material
• High temperatures
• Hardness
• Corrosion/Oxidation

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Chemical Vapor Deposition

• CVD fairly successful
• 1000 C
• Good metallurgical bond
• Thermal expansion mismatch
• Too high for temperature sensitive materials
• Goal to achieve deposition under 550 C

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Physical Vapor Deposition

• Can deposit amorphous alumina and convert to
  a-Alumina
• Can grow a-Alumina with Chromium Oxide template
  layer
• Isoflux ICM-10 can deposit without template layer

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Deposition Process

• Magnetron sputtering the removal of material
  from a solid by energetic bombardment of surface
  by ions or neutral particles

(http//www.pvd-coatings.co.uk/theory-of-pvd-coati
ngs-magnetron-sputtering.htm)
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Isoflux ICM-10

• Inverted Cylindrical Magnetron
• Targets powered separately

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Design of Experiment (39 experiements)
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(Characterization)
(1)

• XRD (X-Ray Diffraction)

(2)
(1) research.memphis.edu/msr/photos/spectrofac2.jp
g
(2) www.hasdeu.bz.edu.ro/.../Atomica/Bragg/SiC1.gi
f
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XRD results
Alpha peaks- 25, 35, 43, 52, 58
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Continuing Characterization

• XRD (X-Ray Diffraction)
• TEM (Transmission Electron Microscopy)
• SAED (Selected Area Electron Diffraction)

(3)
(4)
(3) http//www.mkem.uu.se/Forskning/Oorgan/ald-of-
metal-oxides/ald-growth-of-metal-oxides-on-flat-su
bstrates/images/ald_tem.jpg
(4) http//en.wikipedia.org/wiki/ImageAustenite_Z
ADP.jpg
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Questions?