Meet your 300mm Automation Partner Advanced Robotics Technologies

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Meet your 300mm Automation Partner
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Advanced Robotics Technologies

• Kensington Laboratories is an advanced robotics
  technology leader committed to developing and
  manufacturing the highest quality, most reliable
  and cost effective atmospheric wafer handling
  robots in the industry. Our technical innovation
  along with investment in capital infrastructure
  ensures that our customers receive products with
  superior performance, high reliability, and low
  cost of ownership.

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PATENTED EDGE GRIP TECHNOLOGY

• Kensington Laboratories exclusive patented edge
  grip technology is a prime example of our
  technology leadership in automation systems.
  Other robots contact the wafer within the edge
  exclusion zone increasing the risk of failures
  caused by particle contamination. Our field
  proven edge grip technology enables our 300mm
  robots to provide true edge grip, virtually
  eliminating the potential for defects due to
  particulate generation and improving your process
  yields.

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FEATURES

• Patented Edge Grip Technology
• Patented Automated Self-Teaching System
  Continuous Rotation Capability
• State-Of-The-Art Motion Control
• Capable Machine Tool Quality Construction
• High Resolution Optical Encoders on All

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PATENTED SELF-TEACH SYSTEM

• The advantage of our self-teaching system begins
  with its installation. An expert technician is
  required to teach other robotics systems, a time
  consuming process taking many hours, perhaps
  days. With its built in sensor, a Kensington
  robot is capable of seeing and measuring its
  environment and performing an automated
  self-teach. In effect putting an automation
  expert inside the system itself, reducing the
  time required to bring the system online and
  providing for easy interchangeability of our
  robots.

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INTEGRATED TRANSMISSIVE OPTICAL SENSOR

• An eye safe LED is integrated into the robot end
  effector and provides the robot with superior
  sensing capabilities. Allowing the robot to not
  only accurately map the location and presence of
  wafers in a cassette, but also to detect common
  errors, such as missing, doubled, or
  cross-slotted wafers. Built in sensor technology,
  enables the robot to measure its environment,
  providing the robot with the wafers elevation
  and edge locations.

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STANDARD ATMOSPHERIC ROBOT PLATFORMS

• Kensington Laboratories atmospheric robots are
  designed to the most rigorous performance
  standards. Its machine tool quality construction
  and the meticulous selection of its long-life
  components contribute to our robots unsurpassed
  reliability and performance. Our modular design
  and patented self-teaching capability allow our
  robots to be used both in new systems and as a
  drop-in field replaceable unit (FRU) in existing
  systems. Our attention to detail and our focus on
  performance and reliability ensure our robots
  provide the highest throughput and lowest cost of
  ownership available.

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REACH CONFIGURATIONS
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WORKING ENVELOPE
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Z TRAVEL OPTIONS
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TRACK SYSTEMS

• Kensington Laboratories standard track solutions
  provide high acceleration and overall speed in a
  reliable and proven design. The track and robot
  are mounted vertically, eliminating errors and
  problems associated with conventional bottom
  mounted cantilevered systems. Our track systems
  can also be equipped with integrated alignment
  features that assure the locational accuracy of
  other critical automation elements of the system,
  such as 300mm pod doors and load ports.

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External

• Our external prealigner is designed to mount
  inside the front end of the tool. It provides
  high throughput, up to 450 wafers per hour, while
  maintaining cleanliness, accuracy, and
  reliability. It also allows our edge grip and
  transmissive sensor equipped robots to perform an
  automated one-step self teach.

Integrated
The integrated prealigner is designed to mount on
the shoulder of the robot, minimizing the
footprint of the robot and prealigner system and
maximizing cleanliness, accuracy, and reliability.
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PREALIGNERS

• Both integrated and external prealigners use
  transmissive sensors located within the
  prealigner to sense the wafers edge and
  accurately measure location and orientation
  during a single rotation. They accurately detect
  any combination of SEMI standard wafer alignment
  features.

SUPINATION
Kensington Laboratories single arm robots can be
equipped with a supinating wrist for an
additional rotational axis, allowing the robot to
transfer the wafer to the tool in a vertical or
inverted mode.
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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800