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Reactive Ion etching - PowerPoint PPT Presentation

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Reactive Ion etching


anisotropiy etch rate uniformity selectivity damage. RF power ... high selectivity over SiO2 (almost no etch of SiO2 at low power) ... – PowerPoint PPT presentation

Number of Views:962
Avg rating:5.0/5.0
Date added: 22 September 2009
Slides: 4
Added by: Username withheld or not provided


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