Force Sensor Using carbon nanotubes directly synthesized on micro structure

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Force Sensor Using carbon nanotubes directly
synthesized on micro structure
Y. Takei, K. Matsumoto, and I. Shimoyama The
university of Tokyo, JAPAN MEMS 2007 pp.827830

• Advisor Cheng-Hsien Liu
• Reporter Y. S. Lin
• Date 2007/5/16

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outline

• Introduction
• Principle
• Fabrication
• Experimental result
• Conclusion

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Introduction

• Fabricate a force sensor using carbon nanotubes
  (CNTs) as a sensing element which directly
  synthesized on silicon micro structure

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Principle

• Measured Electrical resistance change of the CNTs
  to detect the force applied on the CNTs

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Fabrication
Carbon nanotubes are synthesized from the
catalysts loaded on the wafer
CVD setup for carbon nanotubes generation using
ethanol as a carbon source
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Fabrication
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Experimental result

• Beam
• ?Length1000µm
• ?width460µm
• 2µm gap between the Si beam and substrate

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Experimental result
500g weight on 1mm diameter plate Electrical
resistance of the bridging CNTs change by 3.2
for a 4.9N force applied on the beam
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Conclusion

• Force sensor using carbon nanotubes which
  directly synthesized on silicon micro structure
• Using PDMS can protect the structure without any
  breakage on the bridging CNTs and also limit the
  CNTs shrinking direction
• Electrical resistance of the bridging CNTs change
  by 3.2 for a 4.9N force applied on the beam

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Thank you for your attention!