Proposal to enhance IC manufacturing curriculum by the addition of polysilicon growth process develo

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Proposal to enhance IC manufacturing curriculum
by the addition of poly-silicon growth process
development

• D. W. Parent, EE
• G. L. Young, ChemE
• J. Lee, ME

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Overview
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Proposal (EE)

• Create instructional materials that have design
  manufacture and test
• EE122 and EE124.
• analog leaf cell to design Current mirrors,
  opamps, amplifiers
• EE179
• Gate array to design digital parts
• EE175, Senior Design
• Analog mixed signal design use a modified form of
  Gate array and analog leaf cell.

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Proposal (EE/MatE)

• EE/MatE129
• Change the process line to self aligned
  poly-silicon gates
• We can go from 4 mask steps to three, thus
  reducing the resources to teach the course and
  provide a more modern environment for students to
  learn in.
• EE/MatE167
• Be able to manufacture the Gate Array/Analog Leaf
  cell in house. (EE 122/124/175/179 become the
  customers of the students in EE/MatE167)

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Proposal (EE/MatE)

• ChemE/MatE166
• Develop a curriculum module around poly-silicon
  growth in a statistics intensive hands on
  laboratory course
• MatE260
• Use poly-silicon growth modules to enhance a
  lecture course.

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Proposal (ME)

• ME189
• Develop a simple MEMS process that SPC data can
  be collected and analyzed.
• Poly-silicon Beam

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Proposal (Outreach)

• Develop a simple script for high-school aged
  visitors with the lab
• Explain from Java down to Boolean logic and then
  to circuit manufacturing.
• Develop simple hands on IC manufacturing modules
  for HS students.
• Partner with MESA to bring in high-school
  visitors to manufacturing lab.

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Current design facilities

• Hardware
• 500MHz logic Analyzer
• 40 Sun workstations
• 280 Sunfire server
• CAD Software
• Cadence Design systems
• Synopsys
• Silvaco

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Current manufacturing facilities
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Summary

• Analog-Mixed Signal (AMS) designs are very
  sensitive to manufacturing variations
• Students will learn how to deal with these
  variations by actually doing design/manufacture
  and testing of AMS parts.
• The addition of poly silicon growth will enhance
  our IC manufacturing curriculum.
• The addition of poly silicon growth will expand
  our IC manufacturing curriculum to include MEMS.