SEMICONDUCTOR PHYSICS & DEVICES S.M.Sze ( )

1
SEMICONDUCTOR PHYSICS DEVICES
???????
2
????

• S.M.Sze (??) ???
• SEMICONDUCTOR DEVICES Physics and Technology
• 2nd Edition
• Donald A. Neamen
• SEMICONDUCTOR PHYSICS DEVICES BASIC
  PRINCIPLES
• 2nd Edition
• Hong Xiao
• Introduction to Semiconductor Manufacturing
  Technology
• ?????
• VLSI???? (????)

3
????

• ???,????? 30
• ??20
• ??20

4
????

• ??? ??
• ??? ????????????
• ??? ??????
• ??? ? ???
• ??? ??????????????
• ??? ?????????????
• ??? ???????
• ???? ????
• ???? ?????
• ???? ????
• ???? ????

5
Chap1 Introduction

• 1.1 Semiconductor Devices(?????)

????????
GWP?20
1998?
?????20
6
???????
pn??
??-?????
??-???-?????
???????
7
???????-??????????(??,1874?)

• ?? MESFET(????????)
• ???????
• ?????---????

• pn?? (??????????)

??pn???????????(BJT) ??pn????????(thyristor)(?????
?switching device)
8
???????

• ????????????
• ?GaAs?AlAs???????

?????????????????????
?? ????????? ??pn?????????
??MOSFET
9
1.1.2 ????????
(?????)
????
?????
??
???????
?????
10
????????(?)
??????????
??????
???????
?????????
????????
?????
11
??????
12
???????????
Gate length 25?m Gate oxide 100nm
13
NVSM(??????????)?????,?????????
???????????
????????,????????
14
???????
15
???????
16
???????
17
Figure 1.8. Exponential increase of dynamic
random access memory density versus year based on
the Semiconductor Industry Association (SIA)
roadmap.49
18
Figure 1.9. Exponential increase of
microprocessor computational power versus year.
19
Figure 1.10. Growth curves for different
technology drivers.50