SYSTEMS ON SILICON MANUFACTURING CO. PTE LTD

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SYSTEMS ON SILICON MANUFACTURING CO. PTE LTD
Red Cross
TOWARDS SAFETY EXCELLENCE
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Analysis Techniques

• Techniques to be used
• 8D (Problem solving)
• HIRA (Risk assessment)
• Fishbone (Root cause analysis)
• Brainstorming SCAMPER technique (Generate
  ideas)
• JSA/PSO (Hazard identification)

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8D Problem Solving Approach
D1 Define Team D2 Describe the Problem
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D1 Define Team

• Facilitator
• Tan Seng Hin (FA Manager)
• Leader
• Oh Siew Khim (FA Assistant Engineer)
• Member
• Teresa Jee Meng Goak (FA Technician)
• Lee Sui Lan (FA Technician)
• CK Wong (Vendor)

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D2 Describe The Problem

• Annual review of FA lab activities
• Through JSA PSO
• Identify new potential hazards
• New potential hazards identified on one activity
• Clearance of condensed corrosive oil on RIE
  machine
• Identified during PSO
• Hazard identification risk assessment (HIRA)
  found the risk to be high

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D2 Describe The Problem
Connected to acid exhaust

• Background

Reactive Ion Etch (RIE) machine
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D2 Describe The Problem

• Background

• Procedure to clear accumulated corrosive oil
• Place chemical bag over pipe
• Open valve to discharge oil
• Wait for oil to fully discharge and stop dripping
• Close valve clean pipe

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D2 Describe The Problem
Peer Safety Observation (PSO)
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D2 Describe The Problem
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D2 Describe The Problem
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D2 Describe The Problem
Hazard Identification and Risk Assessment
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D2 Describe The Problem

• Team Goals
• Reduce the risk of electrocution from critical
  to low.
• Reduce the risk of slip fall from medium to
  low.
• Reduce the risk of backache from high to low.
• Timeline 12 June 2008

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D2 Describe The Problem
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8D Problem Solving Approach
D3 Implement and Verify Containment Action
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D3 Containment Action

• Cover pipe opening with chemical bag to contain
  unforeseen corrosive oil leak
• Slip Fall
• Contact with live wires
• Procedure to check chemical bag before use use
  double bags
• Awareness briefing
• Straighten back when performing task (ergonomic)
• Personnel with backache problem not allowed to
  perform task

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D3 Containment Action
Hazard Identification and Risk Assessment
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8D Problem Solving Approach
D4 Define and Verify the Root Causes
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D4 Verify Root Causes
Material
Method
Wrong material
Potential hazards on condensed oil mist
clearance activity
Procedure not updated
Environment
Wrong PPE
No safety communication
PPE, pipe, bag
Incorrect safe work procedure
Unreliable
Dim lighting
Inferior quality
No safe work procedure
Space constraint
PPE, pipe, bag
clearance bag
Confuse safe work procedure
Procedure too manual
No PPE
Did not follow safe work procedure
No warning signs
Do not know safe work procedure
Reliability
Low working height
Did not use PPE
Parts wear-out
Did not attend safety training
Capability (old injury, physical built)
Machine/ tool
Man
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D4 Verify Root Causes
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D4 Verify Root Causes

• Depend much on administrative control
• Personnel constant monitoring of procedure
• Constantly holding on to chemical bag during
  clearance
• Ergonomic (Low working height)
• Constant exposure to corrosive oil
• Constantly ensuring oil do not drip or leak onto
  floor during clearance
• Need to ensure valve is properly closed
• Need to monitor functionality of valve
• Unreliable material used
• Chemical bag possibly torn by sharp object

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8D Problem Solving Approach
D5 Choose and Verify Corrective Action
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• Engineering solution criteria
• Protection against electrocution
• Protection against slip fall
• Protection against contact with corrosive oil
• Solve ergonomic issue
• No other hazard introduced
• Ease of use
• Ease of maintenance

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D5 Choose and Verify Corrective Action
.
Total 4 ideas generated
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D5 Choose and Verify Corrective Action
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Idea 3
Facility pipe
Facility pipe
Waste bottle direct to pipe
Remove waste bottle
Sitting block
Total 4 ideas generated
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D5 Choose and Verify Corrective Action
Idea 4
Safety cabinet
Door
Collection Tray
Total 4 ideas generated
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D5 Choose and Verify Corrective Action
SCAMPER TECHNIQUE

• Substitute
• Combine
• Adapt
• Modify/Minify
• Put to other use
• Eliminate
• Rearrange

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D5 Choose and Verify Corrective Action
Idea 2
Idea 1
Fit into facility pipe.
Movable funnel
Waste bottle
Combining idea 1 and 2 Movable pipe that fit
into facility pipe and ability to slide in and
out of waste bottle.

• Corrosive oil flow direct into waste bottle
• Personnel has no direct exposure to oil
• Any leak is contained within the piping into the
  bottle.

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D5 Choose and Verify Corrective Action
Idea 4
Prevent direct contact with corrosive oil
Safety cabinet design
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D5 Choose and Verify Corrective Action
Idea 4
Collection tray
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RIE Safety Cabinet
Facility pipe
Movable pipe design with shoulder
Safety cabinet
Door
Waste bottle
Containment tray
Flooring
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D5 Choose and Verify Corrective Action
How it works
Corrosive oil substance accumulation
Flooring
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D5 Choose and Verify Corrective Action
How it works
Open valve
Oil flows through facility pipe direct down to
waste bottle via movable pipe.
Waste bottle
Flooring
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D5 Choose and Verify Corrective Action
How it works
Close valve
Flooring
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D5 Choose and Verify Corrective Action
How it works
Slide movable pipe up to disconnect from waste
bottle
Flooring
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D5 Choose and Verify Corrective Action
How it works
Open door
Flooring
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D5 Choose and Verify Corrective Action
How it works
Remove waste bottle, cap it and dispose as Toxic
Industrial Waste
Flooring
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D5 Choose and Verify Corrective Action
How it works
Replace new bottle
Flooring
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D5 Choose and Verify Corrective Action
How it works
Slide movable pipe down to connect to new waste
bottle
Flooring
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D5 Choose and Verify Corrective Action

• Advantages
• Ease of use
• Ease of removing waste bottle
• User do not need to constantly perform and
  monitor task
• Engineering control
• Oil leak due to improper valve closure or faulty
  valve is contained within cabinet and waste
  bottle.
• Protect personnel (double protection besides PPE)
• Overcome ergonomic problem
• Easy to clean (detachable parts)
• No new hazard introduced

RIE Safety Cabinet
Flooring
RIE safety cabinet
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8D Problem Solving Approach
D6 Implement Permanent Corrective Action
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D6 Permanent Corrective Action
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D6 Permanent Corrective Action
After discharging, slide up pipe
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D6 Permanent Corrective Action
Before After Improvement
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D6 Permanent Corrective Action
Before After Improvement
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D6 Permanent Corrective Action
JSA
No further hazard
PSO
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D6 Permanent Corrective Action
Hazard Identification and Risk Assessment
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8D Problem Solving Approach
D7 Preventive Actions
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D7 Preventive Actions
Prevention is better than cure
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8D Problem Solving Approach
D8 Benefits Future Improvement
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TANGIBLE BENEFITS
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INTANGIBLE BENEFITS
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Review for future improvement
Waste bottle holder to prevent potential bottle
toppling
Waste bottle
Flooring
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Next Project and Plan

• Next project
• Prevent beaker toppling during chemical etching
  using hotplate
• Medium risk

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Thats our journey towards Safety Excellence
Thank You
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Acid exhaust
Small amount of condensation takes place
Machine
Machine
Machine
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E engineering control (no incidence) D PPE
(once in 9 yrs). Partial eng. C Admin control
(did not follow procedure)