SAW Technology and Its Applications Prof. Shi Wenkang

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SAW TechnologyandIts Applications
Prof. Shi Wenkang
Shanghai Jiao Tong University
P.R.CHINA
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Outline

• Concept
• Materials
• Mathematic Model
• Type of SAW Device
• Typical Applications
• Development Tendency
• Research on SJTU

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Concept
What is SAW ? SAW----Surface Acoustic Wave
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Concept What is SAW?

• Mechanical Wave
• propagate in the surface
• Energy Concentrated in the thin layer (lt1?)
• Different Modes
• RSAW,LSAW,LLSAW, SH-SAW, Love Wave,
• LAMB Wave.
• Much lower velocity than Electromagnetic Waves
  (1 105)

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Concept Physical Principal
Based on 1. Piezoelectric effect and
Converse Piezoelectric effect
Mechanical
Electrical
2. Wave reflected at discontinuity media
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Concept Historical Review

• 1885 Discovery by British Physicist Releigh In
  Research on
• seismic Wave
• 1949 Bell Lab Discovery LiNbO3
• 1965 Exciting SAW artificially by American
  Scientist
• R.M.White and Voltmer Using
  Interdigital Transducer(IDT)
• Since 1970s
• Wide Applications in
  Telecommunication, Radiobroadcast,
• TV etc.
• Since 1980s
• SAW Sensor Development

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Concept Advantages

• High Sensitivity
• High Accuracy
• Passive
• Wireless
• Digitalized
• Mass Production
• Many Application-Possibilities

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Outline

• Concept
• Materials
• Mathematic Model
• Type of SAW Device
• Typical Applications
• Development Tendency
• Research on SJTU

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Materials

• Piezo-Materials
• Quartz LiNbO3 LiTaO3 LGS
• The Properties SAW related
• 1. Mechanical-Electronic Coupling
  Coefficient.
• 2. Temperature Related Factor ( TCF )
• 3. Dielectric Factor 4. Phase
  Velocity
• 5. Yangs Model 6. Density
• 7. Insertion Loss 8. Elastic
  Coefficient

Different Materials, Different Cut Orientation
has different properties, so Optimum,Compromise
Design be Needed.
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Outline

• Concept
• Materials
• Mathematic Model
• Type of SAW Device
• Typical Applications
• Development Tendency
• Research on SJTU

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Mathematic Model

• Force Equilibrium Equation

Electronic Charge Equilibrium Equation
Cristoffel Equation
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Outline

• Concept
• Materials
• Mathematic Model
• Type of SAW Device
• Typical Applications
• Development Tendency
• Research on SJTU

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Type of SAW devices
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Outline

• Concept
• Materials
• Mathematic Model
• Type of SAW Device
• Typical Applications
• Development Tendency
• Research on SJTU

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Typical Applications
Delay line Convolver Oscillator
sensor
filter
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Vibration and Acceleration SAW Sensor
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Torque SAW Sensor
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SAW Voltage Sensor
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Flow SAW Sensor
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SAW Gyroscope
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2?coriolis? ????? ????
z
y
v
F
x
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Liquid SAW Sensor
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Gas SAW Sensor
SO2?H2S?CO?NO2?H2 etc.
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Application Examples of SAW technology in
Automobile

• Electronic ID
• Smart Tire
• Exhaust-gas Detection

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Electronic ID
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Smart Tire
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Exhaust-gas detection
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Outline

• Concept
• Materials
• Mathematic Model
• Type of SAW Device
• Typical Applications
• Development Tendency
• Research on SJTU

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Development Tendency

• New material, new technology
• Suitable SAW models, suitable packaging
• Intelligence, minimization, multi-function,
  matrixing
• Industrialization.

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Outline

• Concept
• Materials
• Mathematic Model
• Type of SAW Device
• Typical Applications
• Development Tendency
• Research on SJTU

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Research on SJTU

• Theoretical work
• --- Numerical method to solve
• Christoffe equation
• --- Various wave characteristics
• --- Optimal design
• --- Phase detection criterion
• --- Coupling mode theory

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Research on SJTU

• Laboratory work
• --- Fabrication and test of SAW devices
• ID-Tag prototype Lamb wave device
• (measuring liquid density)
• --- Circuit design and implementation
• wireless data transmission platform
  for
• conventional sensors

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Lamb wave liquid density sensor
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Lamb wave liquid density sensor
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SAW device prototype
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Electronic Circuit
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Schematic of transceiver circuits
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Experiment System
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Results- Lamb Liquid Density
Frequency Response of Substrate in Two Different
Conditions
1-Liquid-covering 2-No liquid-covering
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Results- Lamb Liquid Density
The relation between the Phase Bias and Liquid
Density
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Results- ID-Tag

• Measured impulse response vs. time of an ID-tag
  with bits 1111

Measured impulse response vs. time of an ID-tag
with bits 1011
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SAW Pressure Sensor
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SAW Pressure Sensor Experiment System
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Discussion on Key Problems

• Pressure sensitive coefficient distribution of
  substrate on
• (0o,90o, 0o)

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Discussion on Key Problems

• Pressure sensitive coefficient distribution of
  substrate on (7o,143.6o, 31.8o)

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Projects

• 1.???????,??????????,??
• ?2001G0005b.
• 2.???????,?????????????
• ????????????,???2003?0107.
• 3.?????????????LGS??????
• ?????????????60274062.
• 4.?????????????????????
• ????????????????????
• ?10304012
• 5.???????????

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Research on SJTU

• Publications
• 1 SAW sensors and applications,??????????,?
  ??,??,??,??,??????, Vol.20(4),1999
• 2 Temperature Sensitive Cuts for Surface
  Acoustics Wave in Quartz, Ma Weifang, Shi
  Wenkang, IEEE trans on UFFC, Vol.(48)1,2001
• 3 ?????????????,???,???,??,???????/????????
  ,2002
• 4 A New Member of Micro-sensor
  Family----SAW Sensor, Shi Wenkang, Ma
  Weifang, Liu Ai, International Symposium on Smart
  Structures Micro-system, 2000.
• 5 Analysis and Design of Radio SAW
  ID-tags ,Han Tao Shi Wenkang Wu Jiahui,Chinese
  Journal of Scientific Instrument,2003.01
• 6  Digital Quadrature Demodulation for the
  Wireless SAW Sensing Information ,Wu Jiahui, Han
  tao, Shi Wenkang, Measurement Control
  Technology , 2002.03
• 7  A Novel Wireless Measurement System
  Based on Surface-Acoustic-Wave Devices ,HAN Tao,
  LIN Xiao kun, SHI Wen kang,Journal of Shanghai
  Jiaotong University , 002.08
• 8 ?????????????PC-DSP??????,Design of
  Communication Circuit between PC and DSP in
  Wireless Identification Tags System Based on
  SAW ,??,??,???,???,?? DENG Yong,HAN Tao, SHI
  Wenkang,?????? Journal of Transcluction
  Technology , 2001.04

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Research on SJTU

• Publications
• 9          ????SAW?????????,???,??? MA Wei
  fang,SHI Wen kang, ?????????? Industrial
  Instrumentation Automation , 2001.03
• 10    ??????????, ???,??? , ???? Measurement
  Technique , 2001.02
• ?????????????????,Wireless Identification Tags
  System Based on Surface Acoustic Wave Sensors,
  ??,???,??? LIU Ai, MA Wei fang, SHI Wen kang,
  ???????? Journal of Shanghai Jiaotong University
  2001.05
• ????????????????Liquid Density Sensor Based on
  Lamb Wave Technology, ???,???,?? SHI Wen kang, MA
  Wei fang, HOU Yi, ???????? Journal of Shanghai
  Jiaotong University , 2001.09
• ??-?????????????????????Influence of electrical
  boundary conditions on lamb wave excitation at
  the interface of liquid and piezoelectric
  substrate, ???,??,???,??? MA Wei fang 1,HOU Yi
  1,SHI Wen kang 1,DENG Ming xi 2, ???? Technical
  Acoustics , 2001.01
• ?????????????Acoustic Plate Mode Sensor and
  System design, ??,???,??? Hou Yi Shi Wenkang Ma
  Weifang, ???????? Instrument Technique and Sensor
  2001.02
• ???????????Theoretical Study on Crystal
  Orientation Characteristics of Lamb Wave,
  ???,???,??,??? MA Wei-fang1,SHI Wen-kang1,HOU
  Yi1,DENG Ming-xi2, ????? Piezoelectrics
  Acoustooptics , 2001.02
• ??SAW??????????????Ultra-low Power Comsumption
  Wireless Digital Communication Using SAW
  Technology, ???,???,??? LI Lei yuan,SHI Wen
  kang,MA Wei fang, ?????

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Research on SJTU

• Publications
• ?????????????????Study on Novel ID-Tag System
  based on Surface Acoustic Wave Technology,
  ??,???,??? Liu Ai Ma Weifang Shi Wenkang,
  ?????? JOURNAL OF TRANSCLUCTION TECHNOLOGY ,
  2000.02
• ?????????????????Research on a wireless
  measurement system based on SAW technology
• ??????????????,???,??,?????? JOURNAL OF
  TRANSCLUCTION TECHNOLOGY,1999.4
• ??-????????????????Theoretical Research on Lamb
  Wave Excitation at the Interface of Liquid and
  Piezoelectric Substrate ,???,???,??? MA Wei fang
  1,SHI Wen kang 1,DENG Ming xi 2,?????
  Piezoelectrics Acoustooptics, 2000.06
• ?????????????Study on Temperature Sensitivity of
  Surface Acoustic Wave Devices,???,???,?? MA Wei
  fang,SHI Wen kang,LIU,????? PIEZOELECTRICS
  ACOUSTOOPTICS , 2000.05
• ????????????????Study on Bulk-wave Effects in
  Surface Acoustic Wave Devices , ???,??? MA
  Wei-fang, SHI Wen-kang, ????? PIEZOELECTRICS
  ACOUSTOOPTICS , 2000.01
• ????????????A Kind of Resonance Surface
  Acoustic Wave Sensor , ??,???,??? Cai Ping Ma
  Weifang Shi Wenkang, ???????? INSTRUMENT
  TECHNIQUE AND SENSOR, 2000.07
• ???????????????????????????The Key Technologies
  and Trends in Passive ID-Tags Based SAW Sensors,
  ??,??? Han Tan Shi Wenkang, ?????? Journal of
  Transcluction Technology , 2000.04

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Research on SJTU

• Publications
• Tire Pressure Monitoring system Based on SAW
  Technology, Zhang guowei, Shi Wenkang, Ji
  Xiaojun, ISIST, 2002.
• Properties of LGS Crystal and Its Applications in
  High-temperature sensors, Ji Xiaojun, Shi
  Wenkang, ISTM,2003.
• ?????????????????????????Investigation of SAW
  propagation properties of LGS,LGT,LGN
  ,???,??,Journal of Shanghai Jiaotong university
  ????
• La3Ga5SiO4?????????????? temperature properties
  of SAW propagation in LGS, PIEZOELECTRICS
  ACOUSTOOPTICS?????
• Comparison Characteristics of SAW Propagation on
  LGT Quartz Substrates, Zhang guowei, Shi
  Wenkang,???????
• Temperature characteristics of Surface Acoustic
  Waves Propagating on La3Ga5SiO4 Substrates
  material science and technology
  ???????
• LGS?????????????????,LGS piezoelectric crystal
  and investigation of its SAW properties???,???,
  PIEZOELECTRICS ACOUSTOOPTICS?????
• ?????????????????,Quadrature coherent detection
  of the wireless SAW sensor signals??,???,journal
  of Shanghai Jiaotong university ????

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Research on SJTU

• Publications
• 34 Han,Tao and Shi,Wenkang, Surface acoustic
  wave devices based wireless measurement platform
  for sensors, International Symposium on
  Optoelectronics and Microelectronics, Vol.4601,
  SPIE, COEMA and Southeast University, Nov.9th
  Nanjing, China, 2001 pp14-19
• Han,Tao and Shi,Wenkang, Review of passive and
  telemetric surface acoustic wave sensors and
  system, International Conference on electronic
  Measurement Instruments, ICEMI2001, Nov. 20th
  , Guilin, China pp446-449
• Han,Tao Shi,Wenkang Reflection of impedance
  loaded SAW IDT and its application in wireless
  information transmission of sensors (Accepted by
  Chinese Journal of Electronics)
• Han,Tao Shi,Wenkang Wu,Jiahui and Li,Hanjun,
  Coupling-of-modes theory and its application in
  the analysis of wireless ID-tag Piezoelectrics
  Acoustooptics Vol.24 (2) 2002 pp89-91 (in
  Chinese)
• Han,Tao and Shi,Wenkang, Design of surface
  acoustic wave based wireless measurement system,
  Piezoelectrics Acoustooptics Vol.23 No.5, pp
  327-329,369 2001(in Chinese)
• Han,Tao Shi,Wenkang Wu,Jiahui and Li,Hanjun
  High-resolution information extraction of
  wireless SAW sensor and its hardware
  implementation, Journal of Sensor Technology
  Vol.14 No.4, 2001 (in Chinese)
• Han,Tao and Shi,Wenkang, The application of
  surface acoustic wave devices in wireless
  measurement system Optics and Precision
  Engineering Vol.9(6) pp576-579 (in Chinese)
• Han,Tao and Shi,Wenkang, Study on a novel
  surface-acoustic-wave based wireless measurement
  system, Journal of Shanghai Jiaotong University,
  Vol.36(8) pp1165-1168 (in Chinese)
• Han,Tao and Shi,Wenkang, Analysis and design of
  radio SAW ID-Tags, Chinese Journal of Scientific
  Instrument (in Chinese, to be accepted )   

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Research on SJTU

• Publications
•   Lu, Wenbo Han,Tao An algorithm on amplitude
  and phase estimation of sine signal Journal of
  Shanghai Jiaotong University, (in Chinese, to be
  accepted )
• Han,Tao Shi,Wenkang and Ma, Weifang, Lamb wave
  in piezoelectric plate loading with a liquid
  layer and its potential as liquid density sensor
  
• Han Tao Shi Wenkang Wu Jiahui Analysis and Design
  of Radio SAW ID-ags  Chinese Journal of
  Scientific Instrument
• Han Tao, shi Wenkang,Design of Surface Acoustic
  Wave Based Wireless Measurement System ,
  Piezoelectrics Acoustooptics 2001, 23(5),
  327-329,369.
• Han Tao, shi Wenkang Application of Surface
  Acoustic Wave Devices in Wireless Measurement
  System Optics and Precision Engineering
  ,2001,9(6), 576-579.
• Han Tao, shi Wenkang ,Compensation of
  Temperature-caused Cross Sensitivity of Eddy
  Current Transducer INSTRUMENT TECHNIQUE AND
  SENSOR 2000, (2) 10-12
• Han Tao, shi Wenkang ,The design of a kind of
  non-contact type molten aluminum resistivity
  measuring system Industrial Instrumentation
  Automation, 164(2) 10-12
• Han Tao, shi Wenkang ,Sensing Scheme of Minim
  Liquid Density Based on Lamb-Wave Chinese Journal
  of Medical Instrumentation2002,26(3) 172-173,209

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Thanks !