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Filter, Valve and Pipng


Filter, Valve and Pipng in semiconductor application May 10 2011 TSMC F14 TFE3 Outline Filter Introduction Valve Introduction Piping Introduction Q&A Filter ... – PowerPoint PPT presentation

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Title: Filter, Valve and Pipng

Filter, Valve and Pipng in semiconductor
May 10 2011
TSMC F14 TFE3 ???
  • Filter Introduction
  • Valve Introduction
  • Piping Introduction
  • QA

Filter Introduction
What is a Filter?
  • A filter consists of a series of pores (channels)
    of a given size
  • All particles bigger than the pore size are
  • All particles smaller than the pore can go
    through the membrane

Depth Filter Characteristics Structure
  • Relatively thick (fractions of an inch)
  • Random structure
  • High particle holding capacity
  • Relatively low retention efficiency
  • Potential for shedding particle release
  • Typically used as pre-filter
  • High material content
  • Materials Polypropylene fiber or fiberglass

Membrane Filter Characteristic
  • Relatively thin (150 microns)
  • Continuous polymeric sheet
  • Defined pore size with high retention efficiency
  • High Porosity ( Track etched low porosity )
  • Low particle holding capacity
  • Typically used as final filters
  • Materials - PTFE, PVDF, UPE etc.

Comparison of Membrane and Depth Filter
Depth Filter Graded Density
  • Filter is constructed by wrapping multi-layers of
    fibrous non-woven media on a core
  • There is retention gradient along the depth of
    flow direction by using different media
  • Larger particles retained at outer section and
    smaller particle retained at inner section
  • Planargard CMP1,3,5,7,9,11,13,16

Typical Filtration Devices Pleated Cartridges
  • Filter "pack" contains membrane, plus upstream
    downstream fibrous supports.
  • Supports can be a source of particles and can
    prevent efficient removal of bubbles.
  • Pleat pack is thermoplastically potted to form a
  • Can be made in varied lengths from 2" to 40".

Flow Path
Inlet Flow Path
Cross Section of Pleats
Filter Cartridge Holders
Inline Housing
T-Style Housing
Flow Path
Typical Flow Path
Typical Disposable Filter Assembly
Internal Filter Element
Retention Mechanisms Sieving and Interception
  • In sieving (size exclusion), particles are too
    large to pass though the pore structure. They
    are either captured on the surface or in smaller
    passages inside of the structure.
  • For interception to occur, the particles move
    with the fluid flow but touch a surface and are
    held there by strong forces.

Retention Mechanisms Adsorption
  • Most particles in liquids have a negative charge
    and can be captured by attraction to a positively
    charge spots on the filter.
  • Can be a large factor in liquids with some

Retention Mechanisms Diffusion
Free Path
  • Due to molecular motion, very fine particles move
    in an almost random manner that follows a mean
    free path. Variations along this path may cause
    the particles to come in contact with the filter
    structure and be captured.
  • Although this is a factor in liquids, it is the
    largest factor for high efficiency gas filters.

What is Pore Size Rating and Nominal Retention?
  • Pore Size Rating Definition
  • the largest actual or estimated size pores or
    holes in a filter
  • Nominal Retention
  • Some Fractional Retention of a particular
    particle size (ex. 90, 95, 99, 99.9, etc.)

What is Pore Size Distribution?
  • Pore Size Distribution Definition
  • An estimate of the range and frequency of pore
    sizes which make up a given filter membrane

Loose Vs Tight Distribution
Tight Distribution
Loose Distribution
  • Both are 0.2 um rated
  • filters based on definition
  • of pore size rating

Effects of Particle Loading
Increase in pressure drop or reduction in
  • Smaller membrane pores are plugged first.
  • Larger pores remain open resulting in pathway for
    particles to travel through
  • Retention decreases with heavy loading
  • Decrease in retention can occur before any
    noticeable pressure drop increase

Housing Type For Cartridge Filters Chemlock
Simple Cartridge/Bowl Installation
Twist cartridge 1/4 turn to lock
Attach bowl to head
Tighten locking ring
Micro Contamination Removal
  • What do we use to Remove This Undesired Matter?
  • Filters - Particle Removal
  • Purifiers - Molecular Impurities
  • (e.g. H2O, O2, Hydrocarbon..)

Gas filters- Materials of Construction
  • PTFE (Teflon)
  • Chemically stable to all gases
  • Low pressure drop
  • Metal
  • Stainless steel (316L Low sulfur)
  • Chemically stable, except in corrosives Ozone
  • Nickel
  • Chemically stable to most gases
  • Not for Ozone, CO, hydride gases (PH3, AsH3,
  • Ceramics
  • Chemically stable to most gases
  • can release organics and light metals

(No Transcript)
Valve Introduction
Whats a valve
A valve is a device that regulates, directs or
controls the flow of a fluid (gases, liquids,
fluidized solids, or slurries) by opening,
closing, or partially obstructing various
passageways. Valves are technically pipe
fittings, but are usually discussed as a separate
category. In an open valve, fluid flows in a
direction from higher pressure to lower
pressure. Valves may be operated manually, either
by a handle, lever or pedal. Valves may also be
automatic, driven by changes in pressure,
temperature, or flow. These changes may act upon
a diaphragm or a piston which in turn activates
the valve, examples of this type of valve found
commonly are safety valves fitted to hot water
systems or boilers. More complex control systems
using valves requiring automatic control based on
an external input (i.e., regulating flow through
a pipe to a changing set point) require an
actuator. An actuator will stroke the valve
depending on its input and set-up, allowing the
valve to be positioned accurately, and allowing
control over a variety of requirements.
Valve type
  • ??????????????,???????????, ??, ???,
    ???,?,??,??,???,???????????,?????????? ??????,???
  • ???(Globe Valve)?????????????????
  • ??(Ball Valve) ???????????????????,????????,??,??,
  • ???(Plug ValveEccentric Plug Type)
  • ???(Butterfly Valve) ?????????,????????,????
  • ??(Gate Valve) ???????????????????, ?????????
  • ???(Check Valve)?????????????, ?????????
  • ???(red Valve)???????????????????

Valve Type and classified
  • Valves are quite diverse and may be classified
    into a number of basic types. Valves may also be
    classified by how they are actuated
  • Hydraulic
  • Pneumatic
  • Manual
  • Solenoid
  • Motor

??(Ball Valve)
??? globe valve

???(Butterfly Valve)
???(Plug ValveEccentric Plug Type)
???(Check Valve)
A check valve, clack valve, non-return valve or
one-way valve is a mechanical device, a valve,
which normally allows fluid (liquid or gas) to
flow through it in only one direction
Advantages over Ball and Gate Valves      In
order to operate and seal effectively, seat wear
is inherent in most ball and gate valve designs. 
When the seats eventually wear away so does the
ball or gate valve ability to seal.  Emergency
sealant injection to energize the seal most often
enters the flow, potentially damaging downstream
instrumentation and or contaminating the flow
media.     In fire-safe ball and gate valves when
the primary elastomeric or plastic seals wear
away or are destroyed, metal to metal contact
between the secondary metal seal on the ball or
gate creates abrasion and costly damage to the
key sealing components.
  • Solenoid Valve, Pneumatic Control Valve

A- Input side B- Diaphragm C- Pressure chamber D-
Pressure relief conduit E- Solenoid F- Output side
  • Valve Body
  • Inlet Port
  • Outlet Port
  • Coil / Solenoid
  • Coil Windings
  • Lead Wires
  • Plunger
  • Spring
  • Orifice

The media controlled by the solenoid valve enters
the valve through the inlet port (Part 2 in the
illustration above). The media must flow through
the orifice (9) before continuing into the outlet
port (3). The orifice is closed and opened by the
plunger (7). The valve pictured above is a
normally-closed solenoid valve. Normally-closed
valves use a spring (8) which presses the plunger
tip against the opening of the orifice. The
sealing material at the tip of the plunger keeps
the media from entering the orifice, until the
plunger is lifted up by an electromagnetic field
created by the coil.
  • Direct acting 2-way valves
  • Two-way valves are shut-off valves with one
    inlet port and one outlet port. In the
    de-energized condition, the core spring, assisted
    by the fluid pressure, holds the valve seal on
    the valve seat to shut off the flow. When
    energized, the core and seal are pulled into the
    solenoid coil and the valve opens. The
    electro-magnetic force is greater than the
    combined spring force and the static and dynamic
    pressure forces of the medium.
  • Direct acting 3-way valves
  • Three-way valves have three port connections,
    one being the "common" port and two valve seats.
    One valve seal always remains open and the other
    closed in the de-energized mode. When the coil is
    energized, the mode reverses.  This is the
    pneumatic equivalent of a single-pole
    single-throw electrical switch.
  • Direct acting 4-way valves
  • Four-way valves have four port connections and
    two valve seats. When the coil is energized, one
    set of ports is connected straight through to the
    other set of ports.  In the de-energized mode,
    the connection is reversed.

Piping Introduction
Within industry, piping is a system of pipes used
to convey fluids (liquids and gases) from one
location to another. The engineering discipline
of piping design studies the efficient transport
of fluid. Industrial process piping (and
accompanying in-line components) can be
manufactured from wood, fiberglass, glass, steel,
aluminum, plastic, copper, and concrete. The
in-line components, known as fittings, valves,
and other devices, typically sense and control
the pressure, flow rate and temperature of the
transmitted fluid, and usually are included in
the field of Piping Design (or Piping
Engineering). Piping systems are documented in
piping and instrumentation diagrams (PIDs). If
necessary, pipes can be cleaned by the tube
cleaning process.
Whats piping
Major classifications of steel
(No Transcript)
???? - EMT
???????????,?? PVC??? , ???????,??????????,???????
C?.???????. ??E??A or B ???????.???????????.??(
PVC ???
????????????????????? ????????????????????????????
Whats the PTFE (Teflon)
In chemistry, polytetrafluoroethylene (PTFE) is a
synthetic fluoropolymer of tetrafluoroethylene
that finds numerous applications. PTFE is most
well known by the DuPont brand name Teflon. PTFE
is a fluorocarbon solid, as it is a
high-molecular-weight compound consisting wholly
of carbon and fluorine. PTFE is hydrophobic
neither water nor water-containing substances wet
PTFE, as fluorocarbons demonstrate mitigated
London dispersion forces due to the high
electronegativity of fluorine. PTFE has one of
the lowest coefficients of friction against any
solid. PTFE is used as a non-stick coating for
pans and other cookware. It is very non-reactive,
partly because of the strength of carbonfluorine
bonds, and so it is often used in containers and
pipework for reactive and corrosive chemicals.
Where used as a lubricant, PTFE reduces friction,
wear, and energy consumption of machinery.
Material Poly Tetra Fluoro Ethylene (PTFE)
  • Properties
  • general Upper service temperature 260 C
  • Chemical resistance excellent
  • Specific gravity 2.15
  • Melting point 327 C
  • electrical Dielectric constant 2.1
  • Dielectric dissipation factor 0.0002
  • Dielectric strength gt 1400 Volt / mil
  • Mechanical Tensile strength 3500 psi
  • Elongation 300
  • Compressive strength 3500 psi
  • Flexural Modulus 90 000 psi
  • Hardness D-60
  • Enviromental Water absorption lt 0.01
  • Water resistance excellent
  • Oxygen index gt95

Datasheet PTFE Tubing PTFE is the most
chemically resistant plastic known. Its
mechanical properties are low compared to other
engineered plastics, but it can be improved by
adding fillers such as glass fiber, carbon,
graphite and similar materials. PTFE has almost
ideal dielectric properties. Its dielectric
constant (2.1) and power-loss factor (0.0002) are
low and remain so over a wide range of
temperatures and frequencies. In certain
applications, such as fuel hoses, some electrical
conductivity is required to dissipate static
charges. When exposed to flame, PTFE decomposes
leaving just a little residue. PTFE is extremely
inert and stable up to a temperature of 260
C.PTFE is also virtually unaffected by oxygen,
ozone and UV light.
  • Please briefly describe retention mechanism of
  • What is the definition of pore size distribution?
  • Please briefly describe valve classified and
    choice 3 types valve and describe its function.
  • What is the PTFE tube and its character?