Title: Oerlikon Solar’s path to grid parity Solar Plaza, 11.June Munich Gerold Bьchel, Director PECVD
1Oerlikon Solars path to grid parity Solar
Plaza, 11.June Munich Gerold Büchel, Director
PECVD
2Solutions for a solar powered world
- Introduction to Oerlikon
- Grid parity on the horizon
- Leading thin film technology
- End-to-End manufacturing solution
3Oerlikon group at a glance
- 5.6 billion CHF revenue in 2007
- 19,750 employees worldwide
- 2500 global support
- 1500 scientist and engineers
- 35 countries
- 170 global locations
- 270 million CHF RD investment in 2007
- 6700 living patents
4Oerlikon Solar - Key member of the Oerlikon group
Oerlikon Drive Systems
Oerlikon Components
Oerlikon Coating
Oerlikon Vacuum
Oerlikon Textile
5It all started 14 years ago at the University of
Neuchatel (Oerlikon Solar cooperation partner)
- 1994 1st WCPEC Hawaii
- Johannes Meier Head of RD Neuchâtel
6Oerlikon Solar as first mover in thin film silicon
Product Milestones
2003 2004 2006 2006 2007 2007 2008-2009
- RD Lab opening by Dr. J. Meier and Dr. U. Kroll
- 1.4m2 RD equipment delivered to Schott Solar
- 40 MWp equipment contract with Schott Solar
- 40 MWp front end line contract with ERSOL
- Several contracts for end-to-end solutions
- First Micromorph production line contract
- First Micromorph production line ramp-up
7Our mission
To be the leading supplier of product and
fabsolutions for the PV manufacturing
industry - Equipment and processes - Process
integration and ramp-up - Guaranteed performance
8Solutions for a solar powered world
- Introduction to Oerlikon
- Grid parity on the horizon
- Leading thin film technology
- End-to-End manufacturing solution
9Grid parity for PV in California and Spain
10Grid Parity Lowering the cost per watt
Total Cost Throughput x Power
Wp
High Efficiency Micromorph Tandem Solar Modules
Proven Turnkey Solutions
Oerlikon Advantage
11Path to Grid Parity Oerlikon Leading Technology
Fab nominal capacity
Module efficiency
GW/p
13
12
1
11
0.3
capacity
10
0.12
9
0.08
Micromorph Tandem
8
0.04
Next Generation Thin-Film
MicromorphTandem
7
Amorph
2012
2006
2007
2008
2009
2010
2011
2010
2009
2008
2006
2007
2011
2012
Cost of ownership
CapEx per Watt
/Wp
/W
1.5
2007 for 20 MWp fabs lt 1.5 /Wp (lt1.12/Wp)
4.00
3.50
Grid Parity
1.0
3.00
2.50
GigaCampus
2010 for GWp fabs lt 0.7 /Wp (lt0.52/Wp)
2.00
0.5
1.50
2012
2011
2007
2008
2009
2010
2012
2010
2009
2008
2006
2007
(Calculated with an exchange rate of 1.00 1.34)
12Solutions for a solar powered world
- Introduction to Oerlikon
- Grid parity on the horizon
- Leading thin film technology
- End-to-End manufacturing solution
13Technology - From amorph to micromorph Tandem
a-SiH
mc-SiH
Visible
Near IR
Amorph
Up to 50 more energy absorbed
Micromorph Tandem
14Proven core equipment technology...
15TCO 1200 - Higher efficiency and lower CoO
- Proprietary LPCVD technology
- High electrical conductivity to avoid losses
- High transparency to minimize absorption
- Transparent conductor deposition and tunable
texturing in a single step - No wet etch step required
- Integral to Micromorph process
- High transmission in visible and near IR light
spectrums - Thinnest bottom cell due to improved haze
TCO 1200
TCO
TCO
a-Si/µc-Si
16TCO 1200 - Higher efficiency and lower CoO
The principle of light trapping
TCO 1200
TCO
TCO
a-Si/µc-Si
17LSS 1200 - Efficient and reproducible Laser
scribing
- Production proven thin film PV Laser scribing
system - Excellent linearity and precision
- Narrow scribe lines
- Reliable, stable platform
- Result
- Minimal PV area removal for more power per
modules - High throughput using multiple beam concept
- More than 20 systems in production
Laser
Laser
Laser
a-Si/µc-Si
Pattern 3
Pattern 1
Pattern 2
18KAI 1200 - Proven product for PV layers
- KAI 1200 with Plasma Box reactor
- 40 MHz for highest rate and quality
- 28m2 of 40 MHz deposition area
- Amorph microcrystaline PIN layers
- Single chamber processing
- insitu-clean after every step
- Result
- Proved best in class TF silicon modules
- High throughput
- High system flexibility utilization
lt10 uniformity
PECVD
a-Si/µc-Si
19Micromorph module on 1.4m2Using commercial
reactor
20Module installation at Oerlikon Solar in
Switzerland
21Solutions for a solar powered world
- Introduction to Oerlikon
- Grid parity on the horizon
- Leading thin film technology
- End-to-End manufacturing solution
22End-to-End production solutions
a-Si/ µ-Si
23followed by process integration and production
ramp-up
24Production ramp-up e.g. 60MW micromorph
for illustration purpose only, output curve
depending on project schedule
25Conclusion
- Oerlikon has successfully transferred RD results
into mass production - First customers delivering certified thin-film
silicon solar modules since Q3/2007 - With a proven end-to-end production solution
fastest time to money. - Oerlikon customers of Micromorph Tandem
Technology going mass production in 2008 - On track to achieve grid parity by 2010
- Strong commitment on achieving 0.54/Wp thin film
silicon module production cost in 2010
26Thin-Film Silicon mass production A reality,
here and now
Thank you !