?????? : 1.TFT-Array?(1)

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• ????? ? ??????

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?????? 1.TFT-Array?(1)
???????? PEP1 Dense Cleaner ??
????? ????? Pre-Depo Cleaner ?? ?? ??
???????? Sputter parts ?? ?? ??
Photo ??
AI???????? Al Etcher ?? ??
???????? Stripper ?? ??
????? Dry Etcher ?? ??(???) ??
???? Array Teste
Total Pitch ??
CD Overlay??? CD Overlay / CDOL Measurement ??
Particle Counter ?? ?? ??
??? Anneal Oven ?? ?? ?? ??
???????????????????
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1.TFT-Array?(2)
CVD
????? Laser Repair ????? ????? ?????
??CVD??? Laser CVD ??
???/??/ ??/??? Changer / Exchanger ????? ????? ??
?????? Reflectometer ??
??????? Sheet Resist / Sheet Resistance ??
TEG
??? Vision Inspection ?? ?? ?? ??
Ellipsometer
Surface Profiler
????? / ????? Macro / Micro ????? ????? ?????
????? / ???? / ????? AOI ????? ?????
???????????????????
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1.TFT-Array?(3)-???????
??????? Dense Unpack ??
?????? ???? Digital Macro AOI System ??
???????? AP Plasma Cleaner ??
?????, ??? ???,???? ?????? Parts cleaning
surface treatment ??
???? Developer ??(???)
?????? SUNS System ??
?????? Automatic Transfer System ??
??chamber?? Welding ??(???)
BC/EAP ??
MES ??(???)
??? Conveyor ??
??? Review ??
?????? Ion Shower Doping System ??
???????????????????
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1.TFT-Array?(4)-?????
???? Ball Screw ?? ??
???,??? Mask, Backing Plate (Copper) ??
??? Backing Plate (for CVD) ??
??? Susceptor ??
?????? Electrode Grid ??
??? Diffuser ??
EUV 172?? EUV Excimer Lamp ??
Brushless Motor Servo Motor G. Motor ??
???? Linear Motor ??
???? Linear Guideway ??
???????????????????
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2.TFT-Cell-FEOL?(1)
PI????? Pre-PI Cleaner ?? ?? ??
PI???
PI??? / PI?? Pi Pre-Cure / Pi Post Bake ?? ??
PI?????? PI Inspection System ??
PI?? PI MAIN CURE OVEN ??
Rubbing Machine
Rubbing?????? Rubbing Inspection ?? ??(???)
Rubbing????? ?? ?? ??
????? L.C. ?? ??
?????
C/F Anneal Oven ?? ??
????? Seal Dispenser ?? ??(???)
???????????????????
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2.TFT-Cell-FEOL?(2)
????? / ????? Liquid Crystal Dispenser ?????(???)
??(???)
Spacer Scatter
Ball spacer ????? Spacer Counter Inspector /
Cell Spacer AOI ??
Spacer Prebake Oven ??
Common Paste Dispenser
????? Vacuum Panel Aligner ??(???)
UV Cure ??
????????? ?? ??(???)
????? Seal Main Cure oven ?? ?? ??
?????? ????? LC Inspection ??
Photo Spacer ????? Photo Spacer Level
Mete ???????? ?????(???)
????? Seal Dispenser ?? ??(???)
???????????????????
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2.TFT-Cell-FEOL?(3)
??
????
??
??? Developer ?? ?? ??
???????????????????
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2.TFT-Cell-FEOL?(4)-???????
?????? Photomask inspection ??
BC/EAP ??
MES ??(???)
ARC Oven ??
IRCP ??
HPCP ??
????? Cell Particle Counter ??
Seal????? Cell Seal AOI ??
PI????? Cell PI AOI ??
??????? Cell Burr Check AOI ??
?????? Automatic Transfer System ?? ??
???????? AP Plasma Cleaner ??
???????????????????
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2.TFT-Cell-FEOL?(5)-???????
?????(PI??) PI rework ??
PI??? Dry Asher ??
Cell???? ?????? ??
Cell???? ?????? ??
Spacer?????? ??
????? ?????? FFU UNIT ??
P.P. Box ?????? ??(???)
?????? Auto Review Machine ??
?????? ???? Seal AOI System G5, G6, G7.5 ??
??????? ???? PI AOI System G5, G6, G7.5 ??
????? Open / Short Laser Repair ??
PP- Box??? PP- Box Packer ??
???????????????????
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2.TFT-Cell-FEOL?(6)-?????
???? Linear Guideway ?? ??
???ITO??? ??? Non-contact Resistivity
measurement ??
????????? Surface treatment ??
Brushless Motor Servo Motor G. Motor ??
???? Linear Motor ??
???? Linear Guideway ??
???????????????????
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3.TFT-Cell-BEOL?(1)
????? Glass Cutting ????? ????? ??
??????? (??????) Burr Checker (AOI) ?? ?? ??
????? Grinding ??
??????? Tape Cleaner ?? ??
?????? Wet Cleaner ?? ?? ?? ??
????? CT Prober ?? ?? ??
?????? P/A (Polarizer attacher) ?? ?? ?????(???)
??? Dense Packer ????? ????? ?????
???????????????????
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3.TFT-Cell-BEOL?(2)-???????????
PP-Box??/ ???? PP-Box Packer / Unpacker ??
Brushless Motor Servo Motor G. Motor ??
????????? ??(???)
?????? ???? Automated Panel Inspection
System ??
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
???????????????????
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4.TFT-Module/LCM?-???(1)
?/??????, ?/??? Loader/Unloader ???????? ????????
????????
?????/??? Grinding ?? ??
Cullet Remover ??
???/???? Cleaner ????? ????? ??
Ionizer Blow
Brush ?? ??
?????? Plasma Cleaner ?? ?? ?? ??
???? / ???? AOI ?? ?? ??
?????? P/A, Polarizer Attach M/C ?? ??
????? / ????? COG Bonder ????? ?????
???/??? Dispenser ?? ?? ?? ??
AMT
???????????????????
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4.TFT-Module/LCM?-???(2)
??????/ ???????? Aging Oven ????? ????? ?????
????????
MES/BC/EAP ??
Brushless Motor Servo Motor G. Motor ??
????? Module Laser Repair ??
???? Panel test ??
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
??????
???????????????????
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5.TFT-Module/LCM?-???(1)
????? Grinding ?? ??
Cullet Remover
??? Cleaner ????? ????? ??
?????? P/A, Polarizer Attach M/C ?? ??
?/?????? Loader/Unloader ????? ????? ?????
EPC
COG????? / ??? COG Bonder ????? ????? ??
FPC????? / ??? FPC Bonder ????? ????? ??
??? Dispenser ?? ?? ??
PCB????? PCB Bonder ?? ??
PCB Test ?? ?? ??
??????/ ???? Aging Oven ????? ???????? ??(???)
???????????????????
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5.TFT-Module/LCM?-???(2)
AFT
????????
ACF?? ACF Attachment ??
MES/BC/EAP ??
?????? Automatic Transfer System ?? ??
????? Module Laser Repair ??
Brushless Motor Servo Motor G. Motor ??
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
??????
???????????????????
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6.TFT-Module/LCM?-???(1)
????? Grinding ??
Cullet Remover
??? Cleaner ?? ?? ?? ??
?????? P/A, Polarizer Attach M/C ?? ??(???)
?/?????? Loader/Unloader ????? ????? ??
EPC
??? OLB ?? ??
???? Lead AOI ?? ??
??? Dispenser ?? ?? ?? ??
PCB????? PCB Bonder ??
PCB Test ?? ??
??????/ ???? Aging Oven ???????? ???????? ?????(?
??)
???????????????????
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6.TFT-Module/LCM?-???(2)
AFT
????????
?????? Automatic Transfer System ??
??? ??
??????? ?????? Assembly Line ??
???? ?????? ??(???)
?????? ???? Automated Panel Inspection System ??
?????? Single Axis Robot ??
MES/BC/EAP ??
????? Module Laser Repair ??
???????????????????
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6.TFT-Module/LCM?-???(3)-???
Brushless Motor Servo Motor G. Motor ??
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
???????????????????
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6.Color Filter(1)
PEP1 Dense Cleaner
Pre-Depo Cleaner
Sputter
Photo
Al Etcher
Stripper
Dry Etcher
CF Tester
Total Pitch
CD Overlay??? CD Overlay / CF CDOL
Measurement ??
Particle Counter
Anneal Oven
???????????????????
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6.Color Filter(2)
CVD
????? Laser Repair / Laser-Ink Repair ??
Laser CVD
Changer / Exchanger
?????? OD measurement ??
????? Color measurement ??
Thickness measurement
Vision Inspection
Ellipsometer
Surface Profiler
Macro / Micro
????? AOI ??
???????????????????
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6.Color Filter(3)
????? CF Metal Halide Lamp House ??
??? CF Review ??
????? CF Tokki AOI ??
?????? CF SUNS System ??
???????,?? Color filter review repair ??
???????? Color repair ?? ??
BC/EAP ??
????????
???????????????????
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7.????(1)
???????? Stocker ????? ????? ???????? ??(???)
??????? RGV ????? ????? ????? ????????
??????? MGV (Glass or Cassette) ???????? ????????
?????
?????? Loader / Unloader ???????? ???????? ??????
?? ????????
???? Robot ????? ????? ??(???)
??(???)???? CT C/V System ???????? ???????? ?????
??? ??
???????????????????
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7.????(2)-???????????
Color Filer Glass Conveyor System ??
Panel???? Panel C/V System ??
???????? C/V System ??
????????
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
???? Cassette ?? ??
Brushless Motor Servo Motor G. Motor ??
??????
???????????????????
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8.????????(1)
Clean OHT ??
Clean AGV ??
Clean AMHS ??
????? Laser microscope ??
OLED, organic ????? OLED, organic
evaporation ??
OLED???? ????? OLED organic final testing ??
??????? ??
????????? ??
??????? Photo mask Laser Repair ??
????????? 2DM Optical Measurement ??
?????? ???? ??
PV????? PV Automation System ??
???????????????????
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8.????????(2)
??Cognex ?????? Cognex Machine Vision ??
??Parker ??????? Parker Motion Control ??
??Yokogawa ?????? Yokogawa D.D. Motor ??
Tape Repair ??
Brushless Motor Servo Motor G. Motor ??
?????? Particle counter ??
?????? Facility Monitoring System ??
???????? Surface Particle Counter ??
SEAL??? Seal Inspection System ??
PF??? PF Inspection System ??
????? ??
LCM???? ??/?? LCM Auto Packing Stocker
System ??
???????????????????
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8.????????(3)
BEOL???? ???? Clean Lifter ??
???????????????????
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??????? 1.????-????(1)
??????CVD ??
??????PVD ??
?????(???) Ag/Cn/Ni Plating ?? ??
??????? CMP equipment ?? ??
??????? SOG coater ??
????????
???????????????????
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1.????-????(2)-???
???? Chamber ??(???)
??? Shower Head ??(???)
PVA Brush ??
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
??????? Mss Flow Controller ??
???????????????????
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2.????-????
????? ???
???? / ??
?? Developer ??? ?? ??
??
?????????
?????? Mask Inspection ??
????? UV Curing ??
????? Charge Eraser ??
????? WEE ??
??????? UV Lamp ??
??????
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
???????????????????
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3.????-????
????
???? Etch Bench ??? ?? ??
??????
?????? Stripper Cleaner ??? ?? ??
??? Electrode ??(???)
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
?? Parts Clean ?? ???
??????
???????????????????
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4.????-????
????
??????
?? / ??? / ????? Furnance / High temp
Furnuance ?? ??
?????? Wet Bench ?? ???
??????? Spin Cleaner ?? ???
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
??????
???????????????????
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5.????-????(1)
?????? Optical Measurement ??
ADI?? ??
???? Thin-Film Measurement ??
???? Particle Inspection ?? ??
EAP ??
??????? CCM Lans Holder ??
??? Probing Equipment ??
?????? Particle counter ??
?????? Facility Monitoring System ??
???????? Surface Particle Counter ??
2D/3D???? 2D/3D measuring system ??
????????
???????????????????
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5.????-????(2)-???
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
???????????????????
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6.????-????????
???????? EFEM ??
Stock ??
????? Factory Automation System ?? ??
??????? Automatic Transfer System ?? ?? ??
FOUP????? FOUP Clean Lifter ??
?????? Single Axis Robot ??
??????
???????????????????
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7.IC??-????(1)
???? Probe pin socket ?? ??
???? Sawing placement ??
??/????? Dicing ?? ?? ??
??? Die Bonder ??
????? ??
?? / ??
??? Wire Bonder ?? ??
????? Auto Molding / Mold press ????? ?????
????? Trim / Form / Singulation ????? ?????
????? Laser Mark / Laser marking ?? ?? ??
?? / ???? / ???? Package / Substrate Inspection
/ Vision inspection ????? ?????
??? / BGA??? Ball Mount / Ball Mounter ?? ??
????????
???????????????????
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7.IC??-????(2)-???????
?????? Lapping/Polishing ??
MES/EAP ??
????? Chip Sorter ??
??/??? Bumping ??
???? ASRS ??
???? Loader / unloader ??
?????? Plasma Cleaner ??
2D / 3D???? 2D / 3D measuring system ??
??? Parts ??
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
??????
???????????????????
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8.IC??-Bumping(1)
UBM??
???? Coater ?? ??
??
?? / ?? / ??? Developer / Clean/Stripper ?? ??? ?
? ??
???? Plating ??
UBM??
??/?? Ball Mount / Flux Printing ?? ??
????????
Bumping?? Bumping Inspection ??
MES/EAP ??
?????? Wafer handling system ??
???? Vision inspection ??
???????????????????
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8.IC??-Bumping(2)-??????
??? Parts / Engineering Plastics ??
???? Linear Motor ??
???? Ball Screw ??
???? Linear Guideway ??
????? Special Purpose Machine ??
???????????????????
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9.IC??
??/???? Analog / linear Device Insp ??
?? / ????
AOI?? AOI Inspection ??
????? ??
??????
?? / ????
??????
MES/EAP ??
???? ASRS ??
????????
???????????????????
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10.??????????
??IC??? Automatic programming m/c ??
Clean Stocker ??
OHB system ??
????? Pellicle Mauter ??
??????? CDM Supply System ???
Brushless Motor Servo Motor G. Motor ??
??????
???????????????????
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????????????(1)
???????? AS / RS system Integrator ??
??Cognex ?????? Cognex Machine Vision ??
??Parker ??????? Parker Motion Control ??
??Yokogawa ?????? Yokogawa D.D. Motor ??
??????? CDM Supply system ???
?? ???????? ??
SOLA CELL ??
IC?? ???????? IC Substrate Final Visual
Inspection System ??
IC?????? IC Substrate Desktop Type Automatic
Verification Station ??
???? ???????? Flip Chip Automated Turn Over,
Tray in /out AVI System ??
???????? Flip Chip Desktop Type Automatic
Verification Station ??
????? ???????? Reel to Reel AOI/AFI System ??
???????????????????
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????????????(2)
??????? ???????? New Generation Flip Chip
Automated Turn Over, Tray in /out AVI
System ??(???)
???????????????????