Parker%20Hannifin%20NeSSI%20Status-%20ISA,%20September%202001

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Parker HannifinNeSSI Status- ISA, September 2001

• Surface Mount System Options
• 1) Parker Integrated Conditioning System (PICS)
  w/ SP76 compliant elastomeric seal interfaces
  industrial components
• 2) 1½ SP76 compliant interface w/ metallic seals
  (old ultra-high purity standard)
• 3) 11/8 interface w/ metallic seals (emerging
  ultra-high purity standard)
• 4) R-Max stream switching interface
  (proprietary)

Conditioning
Sample
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Parker HannifinNeSSI Status- ISA, September 2001

• PICS System
• Designed w/ 5 flow channels specifically for the
  majority of sample conditioning systems
• Utilizes 1½ 2¼ SP76 compliant elastomeric
  interface
• Incorporates larger footprint to utilize existing
  industrial devices SP76 compliant
• Substrate heating capability available w/ minimal
  development

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Parker HannifinNeSSI Status- ISA, September 2001

• 1½ SP76 UHP System
• Designed for delivery of ultra high purity gasses
  used in semiconductor applications
• Recommended for detection thresholds in the PPB
  range
• Utilizes metallic C seals at interfaces
• Systems normally incorporate welded and faceseal
  type fittings departure from existing petrochem
  technology

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Parker HannifinNeSSI Status- ISA, September 2001

• 11/8 UHP System
• Same features as 1½ system, only smaller
• Has emerged as de-facto standard based on desires
  of leading semiconductor equipment OEM
• Heated substrates available
• In full production, currently supplying (2) 500
  PPB detection threshold systems to chemical
  processing facility

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Parker HannifinNeSSI Status- ISA, September 2001

• System Component Availability Comparison