MPW Design Introduction Course - Module 4

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MPW Design Introduction Course - Module 4
Process Description Part II
Tyre pressure sensor(SensoNor)
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Contents

• Process Description, Part I
• Cross section overview
• Key process features
• MPW process step-by-step
• Process Description, Part II
• Absolute design limitations
• Process control monitors
• Test data

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Absolute design limitations

• To avoid breakage during fabrication
• Maximum allowed stress 500 MPa under the
  following conditions
• 2000 g acceleration
• 1 bar (0.8 bar) pressure difference

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Process control monitors

• Test dies
• electrical parameters
• mechanical dimensions

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Process control monitors

• Product wafers
• Visual inspection
• Oxide thickness
• Diaphragm thickness
• Test wafers
• Sheet resistivity
• Film thickness

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Test data

• Automated test data collection
• Measurement database
• Process monitoring / SPC

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SPC
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Test certificate
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Chapter 4MPW Process Description

• End of this chapter
• Questions or comments?