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The next generation solar technology

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The next generation solar technology. Crystalline Silicon on ... Deposit Anti-Reflection Coating (PECVD) Borosilicate Glass. SiN. 3mm. Deposit Silicon Film ... – PowerPoint PPT presentation

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Title: The next generation solar technology


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Crystalline Silicon on Glass
The next generation solar technology
3
Crystalline Silicon on Glass
Silicon Preparation Process
4
3mm
Borosilicate Glass
Texture Coat Both Surfaces (Dipping)
5
SiN
3mm
Borosilicate Glass
Deposit Anti-Reflection Coating (PECVD)
6
Si
1.5 ?m
SiN
3mm
Borosilicate Glass
Deposit Silicon Film(PECVD)
7
0
Si
1.5 ?m
SiN
3mm
Borosilicate Glass
Crystallise Si
8
0
Si
1.6 ?m
SiN
3mm
Borosilicate Glass
Anneal Defects
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0
Si
1.5 ?m
SiN
3mm
Borosilicate Glass
Hydrogen Passivation
10
0
Si
1.5 ?m
SiN
3mm
Borosilicate Glass
Hydrogen Passivation
11
Crystalline Silicon on Glass
Device Fabrication Process
12
Cell Separation Grooves (Laser)
13
Cell Separation Grooves (Laser)
14
P150W Resin coating(Spray then dry at 90 C)
15
Crater Openings in P150W(Ink Jet)
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Crater Openings in P150W(Ink Jet)
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Crater Etch(5min Purple Etch)
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Crater Etch(5min Purple Etch)
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Crater Reflow
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Crater Reflow
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Dimple Openings in P150W(Ink Jet)
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Dimple Openings in P150W(Ink Jet)
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Dimple Etch(10sec Purple Etch)
24
Aluminium Deposition(100nm Sputter)
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Aluminium Deposition(100nm Sputter)
26
Metal Scribing(Laser)
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Completed CSG Structure
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