Solidstate nanopores are nanometerscale pores in an insulating solid membrane or chip that can be us

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Solid-state nanopores are nanometer-scale pores
in an insulating solid membrane or chip that can
be used for rapid electrical detection and
characterization of biomolecules. The
solid-state nanopore technology has the potential
of becoming the future platform for rapid
bio-analysis and DNA sequencing. The standard
nanofabrication techniques such as e-beam
lithography and focused ion-beam lithography are
incapable of producing sub-10 nanometer pores.
Here, a low-cost method using electrochemical
feedback etching is developed which has resulted
in nanopores in the range of 1-3 nm.
A DNA translocation event through a silicon-oxide
nanopore device fabricated using a table-top
feedback etching technique. Insets two TEM
photos showing two nanopore devices, each
containing two nanometer-scale pores in a silicon
chip (after oxidation).
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A low-cost nanofabrication method for fabricating
silicon nanopores for rapid detection of
biomolecules X. S. Ling, Brown University,
NIRT-0403891
Education One undergraduate student (Adam
Politzer) contributed to this program. Adam is
currently a graduate student at UC Berkeley. Two
graduate students Hongbo Peng and Shanshan Wu are
carrying out their Ph.D. thesis studies under
this program. Postdoc Sang Ryul Park is a key
participant of the project.
Societal Impact Silicon nanopore technology,
developed with NIRT support, has the potential of
revolutionizing molecular biology and medicine.
This technology is being commercialized and is
being further developed for a number of important
genomic applications .