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Research and development of phase controlling system for nanoimaging DUV optics
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phase controlling system for nanoimaging DUV optics. Dr. Mikhail GAN. St.Petersburg State University of Information ... Optical output power up to 100 mW ... – PowerPoint PPT presentation
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Title: Research and development of phase controlling system for nanoimaging DUV optics
1
Research and development ofphase controlling
system for nanoimaging DUV optics
- Dr. Mikhail GAN
- St.Petersburg State University of Information
Technologies, Mechanics and Optics.
2
Agenda / content
- Description of the Project
- Nearest analog
- Participants
- Cooperation
- Contribution of TOPTICA
- Contribution of RINO
- Background
- Interferometric measurements
- Accuracy in DUV interferometry
- TOPTICA FHG 110 laser
- Deep UV technology for nanometric research and
control - Basic results of the project
- Commercial perspective
- Project cost and duration
- Thank you
3
Description of the Project
- Creation of European DUV interferometric system
for nanometric measurements. - Accuracy lt 1 nm
- Wavelengh - 248.35 nm
- Coherence length gt10 m
4
Nearest analog
- At the moment the nearest analog is American
system ZYGO GPI 248. The disadvantages of the
system are - Impossibility of wavelength tuning
- Low coherence length
- Impossibility of birefraction control
- Interferometric system designed in the current
project will provide - Wavelength tuning
- High coherence length
- Birefraction measurements
- High accuracy
5
Participants
- From Russia
- Research Instute of
Nanophotonics and Optoinformatics (RINO) - St.Petersburg State University of Information,
Technologies, Mechanics and Optics (ITMO) - From EU
- TOPTICA Photonics AG
6
CooperationTOPTICA RINO
- Development and production of the higtehcogerent
DUV laser
- Development and production of DUV interferometric
system
7
Contribution of TOPTICA
- Development and production of the higtehcogerent
DUV laser source based on FHG laser system. - Including
- achieving of homogeneity and diffraction
divergence of laser beam, for high precise
interferometric application. - increasing of reliability,
- minimization of warming up time
- increasing of the resource and life time
- dust protection.
8
Contribution of RINO
- Development and production of DUV interferometric
system. - Including
- Investigation beam coherence, homogeneity and
divergence. - wavefront control.
- interferometric software design
- development of techniques for control of surface
quality with accuracy lt 1 nm. - development of techniques for control of
homogeneity and birefraction. - development of techniques for refractometry
9
Background
- RINO
- - optical design
- - optical control
- - interferometry
- TOPTICA Photonics AG
- - scientific UV lasers
10
Interferometric measurements
11
Accuracy in DUV interferometry
- Designed interferometrs will allow to achieve
accuracy - from 0.01 ? up to 0.001 ?
- in case of DUV, when ? 248 nm
- So accuracy of the interferometric system is
expected to be from 2,48 to 0,24 nm
12
TOPTICA FHG 110 laser
- Laser system FHG TA 110 of TOPTICA can be
considered as a prototype of the required laser
system. - Wavelength range 205 - 280 nm
- Transversal single-mode
- Tunable, single frequency
- Designed for ultra high resolution spectroscopy
- Laser linewidth 4 MHz,
- Optical output power up to 100 mW
- The sufficient disadvantages of this system do
not allow to use this laser as a light source for
interferometry. Therefore current project
includes additional researches for achieving the
quality that the interferometer system requires.
13
Basic results of the project
- Prototyping of the hardware and software
- Development of technique for refractometry,
birefraction measurement and control of surface
quality with nano accuracy,
14
Commercial perspective
- The designed DUV interferometric system can be a
base for commercial projects demanded by
universities and industry of DUV material and
system production.
15
Project cost and duration
- Duration 3 years
- Estimated cost
- Laser system - 550 000 EUR
- Interferometry system - 550 000 EUR
16
Thank you
- Research Institute For Nanophotonics and
Optoinformatics (SPb State University of
Information, Tecnologies, Mechanics and Optics) - St. Petersburg, Birzhevaya line 4
- Russia
- Dr. Mikhail Gan
- Chief of division
- 79219356048
- gan_at_mail.wplus.net
- www.ifmo.ru
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